Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Friction (Internal Resistance), Operating Temperature(°C): -10～70, Cushion: Air cushions on both sides + damper cushions, Operating Pressure(MPa): 0.01 to

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Friction (Internal Resistance), Operating Temperature(°C): -10～70, Cushion: Air cushions on both sides + damper cushions, Operating Pressure(MPa): 0.01 to

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Friction (Internal Resistance), Operating Temperature(°C): -10～70, Cushion: Air cushions on both sides + damper cushions, Operating Pressure(MPa): 0.02 to

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Friction (Internal Resistance), Operating Temperature(°C): -10～70, Cushion: Air cushions on both sides + damper cushions, Operating Pressure(MPa): 0.02 to

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Cushion: Air cushions on both sides + with damper cushions, Operating Pressure(MPa): 0.05 to 1, Specification

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Cushion: Air cushions on both sides + with damper cushions, Operating Pressure(MPa): 0.05 to 1, Specification

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Cushion: Air cushions on both sides + with damper cushions, Operating Pressure(MPa): 0.05 to 1,

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch,

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch,

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -20～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 89.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 45, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 8, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 108.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 32, Table Size Height H(mm): 23, Table Parallelism(µm): 55, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 8, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 108.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 32, Table Size Height H(mm): 23, Table Parallelism(µm): 55, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 12, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 103, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 39, Table Size Height H(mm): 30, Table Parallelism(µm): 45, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 120.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 55, Table Surface Treatment

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 139.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 74, Table Size Height H(mm): 55, Table Parallelism(µm): 60, Table Surface Treatment

Series IDG

(23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM