High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

In-line Air Filter

500 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC77 12 0.3 MPa 30 Pressure drop [kPa] 0.1 MPa 20 0.5 MPa 10 0.7 MPa 0 0 200 400 600 Flow rate [L/min (ANR)] 4 ZFC Series Construction Component Parts Replacement Bracket Part No.

Large blow and

Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] 1,600 700 ---6 ---6 Discharge flow rate Discharge flow rate 1,400 Vacuum pressure [kPa] Vacuum pressure [kPa] 600 Vacuum pressure Vacuum pressure ---5 ---5 1,200 500 ---4 ---4 1,000 400

AMD

B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

RB/RBL/RBQ

Selection of applicable model 78.5 94.2 110 173 188 236 393 Selection of applicable model According to Data D , the tentatively selected RB2015 satisfies Me = 260 kg < 400 kg at = 0.3. Ultimately, it will result in an operating frequency of n20 < 25, without causing a problem.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 to 60C Ambient & fluid temperatures 50 to 400 mm/s Piston speed Rubber bumper on both ends Bumper Non-lube Lubrication +1.5 0 mm Stroke length tolerance Manual type Table rotation system Right, left, free repetetive rotation Table rotation direction

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maximum speed (mm/s) 100 All strokes 200 300 400 600 800 500 Stroke (mm) CX (1) (2) (3) 8 Selection graph D(4) (5) (6) (7) 12 to 40 -X Horizontal Mounting 20Data W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, 30.64425 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, PC, 63MM LE ELECTRIC ACTUATOR, 115.08129 lb, StrokeModel (mm)20030040050060070080090010001200150020003000LEJB63?DD?DD?D??DDD

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.? The LEJ offers 2 types of motor cables, standard and robotic (flexible).? Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.? LEJS (ball screw drive) can be used for both horizontal and

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, LC, 32MM LE ELECTRIC ACTUATOR, 9.5901 lb

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

The LEF series slider type electric actuator features a low profile height of 46mm *. The actuators main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 4.6297 lb

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.