PROFIBUS DP Compatible Fieldbus System

32 Input Unit Manifold Model indication and How to order 33 Summary of Product parts 34 Mounting and Installation 35 Installation 35 Wiring 35 Setting 39 Specification 40 Specifications 40 Dimensions 41 EX9 series General Purpose Output Block Model indication and How to order 43 Summary of Product parts 44 Mounting and Installation 45 -1No.EX##-OMO0019 Installation 45 Wiring 46 Setting 48

Fieldbus system (DeviceNet compliant)

Specifications 48 Dimensions 48 Maintenance 49 Troubleshooting 50 Option 55 -2No.EX-OMI0003-H Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Digital Flow Switch

Wiring 18 Outline of Settings [Measurement mode] 22 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 23 Default settings 23 Function Setting [Function selection mode] 25 Default settings 26 F0 Reference condition/Unit selection function 27 F1 Setting of OUT1 29 F2 Setting of OUT2 37 F3 Response time 42 F10 Sub display 43 F20 External input 47 F22 Setting of analogue output 48

Electric Actuator / Guide rod Slider

Specification 2.1 Guide rod Slider LEL Series Model LEL25M LEL25L Stroke(mm) Note 1) (100), (200), 300, 400, 500, 600, (700), (800), (900), (1000) Work load(kg) Note 2) Horizontal 3 5 Wall mounting 2.5 5 Speed(mm/s) Note 2) 48 to 500 48 to 1000 Actuator specification Max, Acceleration/Deceleration(mm/s2) 3,000 Positioning repeatability (mm) 0.08 Lost motion [mm]Note 3 0.1 or less Lead equivalent

Vacuum Unit Ejector / Vacuum Pump System

Maintenance 48 8.1. Maintenance 48 8.2. Replacement Procedure 50 9. Specifications 55 10. Port Layout 60 11. Exhaust/Flow Rate Characteristics 70 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 70 11.2. Vacuum Pump System Flow Rate Characteristics 72 11.3. Vacuum Release Flow Rate Characteristics 72 12. Limitations of Use 74 13. Troubleshooting 76 -1No.

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

. -10 -20 -30 -40 -50 -60 -70 -80 0 0 to 10 10 to 20 20 to 30 MY3*16/20 Without spacer Short spacer Long spacer 0 to 12 12 to 24 24 to 36 MY3*25/32 Without spacer Short spacer Long spacer 0 to 16 16 to 32 32 to 48 MY3*40/50 Without spacer Short spacer Long spacer 0 to 24 MY3*63 24 to 48 48 to 72 Without spacer Short spacer Long spacer Table 1 Stroke adjustment range (Without spacer, with

Fieldbus system PROFINET compatible SI Unit

Wiring 48 7.4. Process data 48 7.5. LED indicators 49 7.6. Block diagram 50 8. Digital Output Module EX245-DY1 51 8.1. Parts and description 51 8.2. Specifications 52 8.3. Wiring 53 8.4. Process data 53 8.5. LED indicators 54 8.6. Block diagram 55 9. IO-Link Module EX245-LA1/LB1 56 9.1. Parts and description 56 9.2. Specifications 57 2 No.EX-OMW0011-B 9.3. Wiring 58 9.4.

High Vacuum L Type Valve

96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66 XLS-16-P*G 40 96 113 38 30 35 17 23 87 66.5 XLS-25-P*G 50 121.5 138.5 48 40 40 26 25.5 89.5 69 9 XL*-OMI0013-B 6.Period and Scope of Warranty The waranty period is 0.5 million cycles (under SMCs endurance test conditions), 1 year in service or within 1.5

Cylinder with Turntable Series MGT

56 71 100 125 150 24 24 35 188 225 272 Rc 1/4 Rc 3/8 Rc 3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 70 80 100 14 14.5 17.5 G 1/4 G 3/8 G 3/8 63 80 100 110 140 166 142 180 210 28 25.5 32.5 NPT 3/8 NPT 3/8 (mm) 25st 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48

ML1C

M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 M6 x 1 12 16 116.5 M8 x 1.25 14 M10 x 1.5 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 AA BB CC DD EE FF GG II JJ KK LL MM NN WW XX ZZ Model ML1C25 ML1C32 ML1C40 1/ 8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 8 D1/ 8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

) 170 (179) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 1000 (1001 to 1400) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 204 (215) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235 255 192 194 65 76 45 20 34 20 205 1000

Table of Contents

kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 48

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-A72H D-A80H (Without indicator light) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Contact protection box CD-P11 D-A80H Auto switch model LED Brown Relay, IC circuit, PLC Applicable load OUT Brown Choke coil Resistor 24 V or less AC DC 48 V AC DC 100 V AC DC

MRHQ

15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4 (one each on three sides) 0 -0.062 47h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M5 x 0.8 depth 8 8 22 8 12 25 11 6 6 29 Side A Side B 41 12-11-14 15 Rotary Gripper Series MRHQ MRHQ20 A MHZ B 48

A

36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74

KA

Soft nylon Polyurethane 4 3.2 KAU23-00 33 34 37 17.5 18 20 9.6 10.4 12.8 9 9.7 11.7 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 45.4 45.4 28.4 28.4 17.7 17.7 9 7 5 KAU04-00 KAU06-00 13.4 13.4 4.2 4.2 3.4 2.9 8 6 24.5 27.5 30 15.2 18.5 20.9 13.7 16.1 18.1 42.5 48 51 KAU08-00 11 16 12 10 KAU10-00 KAU12-00 23 Plug-in reducer: KAR Effective area (mm2) Weight (g) Tube O.D.

High Purity Fluoropolymer

Approximately 20g of super high purity hydrofluoric acid (48%) is measured and injected into the tube. The interior wall of the tube is immersed at normal temperature for one week with both ends of the tube plugged.

Low torque Metal seal type Rotary joint

M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2 P = 8.2 29 8.2 x 7 = 57.4 P = 8.2 4 3 105 15 *5 5 6 7 8 7.5 4.5 25H8 (10) 5.5 (10) 30H8 45 45 1 2 3 1 12 P=45 8 P=30 2 11 4 7 10 3 22.5 5 6 6 7 8 9 4 5 4-M3 x 0.5 thread length 8 P.C.D.48

CYP

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.