Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

1/8", 5/13" 6 : 30 5/32", 1/4" 8 : 50 5/16" 1103 Air Suction Filter Series ZFA Model ZA Prevents vacuum equipment trouble due to airborne contaminants.

Thermo-dryer

Therefore, the amount of condensed water is as follows (per 35 ft3 (1 m3)): 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218psi (1.5 MPa) 189psi (1.3 MPa) 160psi (1.1 MPa) 131 psi (0.9 MPa) 102psi (0.7 MPa) 73psi (0.5 MPa) 44psi (0.3 MPa) 15psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry F: Plug-in Option Port size Nil 01 Without sub-plate Rc 1 8 02 Rc 1 4 2 50 01 F Z VZS3 1 Plug-in 5 G 50 VZS3 01 Non plug-in 2 Symbol Coil rated voltage Thread type Option 2 position single 1 2 3 4 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220

HRX-OM-Y098

HRX-OM-Y098 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-W060

HRX-OM-W060 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

method setting unit 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

FQ1

1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only for FQ1012 when two L250 elements are used. 84 Model A B P No. of elements 1/2, 3/4 1/2, 3/4, 1 3/4, 1 FQ1010 FQ1011 FQ1012 L125 x 1 L250 x 1 L250 x 2 204 332 593 267 395 656 DRAIN G1/4 Pull-out min. 40 5 Series FQ1 Made to Order Consult

MXH Series Compact Slide

) Displacement (mm) Displacement (mm) 40 50 0.2 0.2 25, 30 40 Stroke Stroke Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.20 0 0.37 0.57 0.76 0.96 Yaw moment My(Nm) Pitch moment Mp(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb MXH16 MXH16 0.16 0.3 60 0.14 60 50 0.25 50 Displacement (mm) 0.12 40 0.2 40 0.1 25, 30 25, 30 15, 20 0.15

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Digital Flow Switch

--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

0 @1 Stopper Resin !1 Replacement Parts Cover !

Digital Flow Switch (Integrated display type)

Max. 1 NL/min 10 NL/min PF2A710 3.5 CFM x 10-2 35.0 CFM x 10-2 5 NL/min 50 NL/min PF2A750 18 CFM x 10-2 176 CFM x 10-2 10 NL/min 100 NL/min PF2A711 3.5 CFM x 10-1 35.5 CFM x 10-1 20 NL/min 200 NL/min PF2A721 7 CFM x 10-1 71 CFM x 10-1 50 NL/min 500 NL/min PF2A751 18 CFM x 10-1 176 CFM x 10-1 : Analogue output is based on the rated flow range at normal condition.

New

Tightening Torque for Piping Connection thread Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Rc1 1/2 Rc2 Rc2 1/2 Rc3 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 48 to 50 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. 5.

MRQ

(mm) (mm) 50 75 100 40 10 20 25 30 15 Stroke 5 12.5 15 12.5 Y 20 20 15 15 25 30 17.5 20 20 Q 63.5 58.5 63.5 63.5 61 71 73.5 61 E 61 66 MRQBS32-lCA-A7/A8SMRQ32, #1(#1+(#1/ SET #010)+ #4) 1.5-12 Rotary Cylinder Series MRQ Flange Style/MRQFS32 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

Series MLGP

Minimum auto switch mounting stroke (mm) Bore size (mm) Auto switch Number of auto switch mounted 20 25 32 40 50 63 80 100 model 1 pc. 5 D-A9(V) D-M9(V) 2 pcs. 10 1 pc. 5 N o t e 2 ) D-M9W(V) D-M9AV 2 pcs 10 1 pc. 5 N o t e 2 ) D-M9A 2 pcs. 10 N o t e 2 ) 1 pc. 5 N o t e 1 ) 5 D-Z7/D-Z80 D-Y59/D-Y7P 2 pcs. 10 1 pc. 5 D-Y69 D-Y7PV 2 pcs. 5 1 pc. 5 N o t e 2 ) D-Y7W(V) D-Y7BA 2 pcs. 10 N o

MHY2/MHW2

light at ON Green light at ON MRHQ Finger fully closed Finger fully open 2 2 4 2 3 MHY2 -10D Auto switch 4 4 7 4 5 Finger fully closed 2 2 4 2 2 MHY2 -16D Finger fully open 3 3 6 3 4 Finger fully closed 2 2 3 2 2 MHY2 -20D Finger fully open 3 3 5 3 3 Finger fully closed 1 MHY2 -25D 1 3 1 2 Finger fully open 2 2 5 2 3 2.8-15 Series MHW2 20, 25, 32, 40, 50 180 Angular Gripper Rack & Pinion

NCA1

8 3/8 1.3 1.06 2.19 5/16-24 2 1/4 1 2.48 3/4 1.75 3 1/8 3/4 2 325 (3.25") 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 3/4 1/2 1/2 1/2 7/8 0 1/2 5/8 1.57 1.18 3 3/4 1 1/4 3/8-24 3/8 2.72 2.34 1 11/64 1 1 2.76 4 1/4 400 (4") 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 1 1 2.34 2.72 1/2 3 3.32 4 1/4 3/8-24 4 0 1/2 1/2 5/8 1.57 1.18 1 3/8 3/4 15/64 1/2 1/2 1/2 7/8 Bore size (in) SA XA ZA 150 (1.5") 6