C76

9 @0 q w e r t y u i o !

Manifold Specifications

assembly DIN rail VZ5000-51A-1U e VFN For D side, set with w VZ5000-52A-2D r VZ5000-52A-1U For U side End block assembly t VZ5000-52A-1D For D side End block assembly y VZ5000-52A-2U End block assembly For U side, set with e u VZ5000-51A-1M Without D-sub connector, For indicated location P/R port with One-touch fitting for 10 SUP/EXH block assembly i To add a manifold block assembly, add

Table of Contents

Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.

C76

9 @0 q w e r t y u i o !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CG1Q20-PS CG1Q25-PS CG1Q32-PS CG1Q40-PS CG1Q50-PS CG1Q63-PS CG1Q80-PS CG1Q100-PS Contents 20 25 32 40 50 63 80 100 Set of the nos. u, i, o, !

Secondary Batteries

Enclosure: IP65 compliant Series 2 4 90-SV2000 90-SV4000 SUP/EXH block assembly specifications SI unit Protocol type DeviceNet Symbol Q Internal pilot External pilot Nil R Valve stations P, E port location U D B Note Symbol 02 Stations U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) 2 stations (1) Double wiring specifications 08 02 8 stations 2 stations (

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

S070

1 Barb fitting assembly (for 1(P), 3(R) ports) SS07051A60 Applicable tubing 6/4 Note) Order is accepted in 10 units. 4-11-15 Series S070 Exploded View of Stacking Type Body Ported Type/SS073M01-C Exploded View of Stacking Type D side end plate assembly Valve U side end plate assembly w e q r < U End Plate Assembly > q U end plate assembly no.

2/3 Port Valve

0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !

IIIIIII

E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2 (36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl )

Modular Type Regulators Series AR

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

3 Position Cylinder Series RZQ

U U U U U U U U 32 40 50 63 27 29 31.5 32.5 38.5 35 38 34 30.5 32.5 35 36 42 38.5 41.5 37.5 44 REA 36.5 38.5 41 42 48 44.5 47.5 43.5 50 40 42 47.5 48.5 54.5 51 54 50 56.5 REB REC Operating Range CY (mm) Bore size Auto switch model 32 40 50 63 CX D-A9 (V) 9.5 9.5 9.5 11.5 MQ D-M9 (V) D-M9W (V) D-M9A (V) L D-A7 (H) (C) D-A80 (H) (C) 6 5.5 6 6.5 RHC 12 11 10 12 RZQ D-A79W 13 14 14 16 D-F7 (

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

PEEK

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bushing assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 SUY u Spacer 8 i !

0.55

Exploded view q r How to Calculate the Flow Rate u For obtaining the flow rate, refer to front matters 44 to 47. t y e o i o Magnifying figure Self-up screw 2 1 3 1504

Mechanical Valves Series NVM, NVFM, NVZNI

E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2 (36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl )

High Purity Chemical Valve

This can cause damage to the valve body. 482 Series LVH Manually Operated Integral Fitting Type/Threaded Type Construction Integral fitting type Threaded type u u q q e w e w LVC A B A B r LVA Description Material Parts list No.

Electromagnetic Digital Flow Switch

Sea water u Corrosive to the product GALDEN u Electric conductivity is too low. Fluorinert u Electric conductivity is too low. Ethylene glycol u Electric conductivity is too low. Ethanol u Electric conductivity is too low. Methanol u Electric conductivity is too low. Chloride water (Hypochlorous acid) u Corrosive to the product 1. Never use in the presence of explosive gases.

Thermo-chiller

Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.

Manifold Specifications

1U For U side End block assembly t VZ3000-52A-1D For D side End block assembly y u VZ3000-52A-2U For U side, set with e End block assembly VZ3000-51A-1M Without D-sub connector For indicated location SUP/EXH block assembly i To add a manifold block assembly, add it to the U side so that the terminal number of the D-sub connector and the valve link position will be in accordance with the circuit