Series: JSY3000, Type: Side-Ported, Serial Interface, EX260, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: PNP, Negative Common, Valve Stations: 8 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, Built-in Silencer, A,B Port Size: ø6 One-touch Fitting

Series: JSY3000, Type: Side-Ported, Serial Interface, EX260, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: PNP, Negative Common, Valve Stations: 10 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, Built-in Silencer, A,B Port Size: ø6 One-touch Fitting

Series: JSY3000, Type: Side-Ported, Serial Interface, EX260, SI Unit: w/o SI Unit, SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 12 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, Built-in Silencer, A,B Port Size: ø6 One-touch Fitting

Series: JSY3000, Type: Side-Ported, Serial Interface, EX260, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: PNP, Negative Common, Valve Stations: 16 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, Built-in Silencer, A,B Port Size: ø6 One-touch Fitting

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 8 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: 0 (w/o SI Unit), SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 12 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 16 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 4 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: Direct Mounting, DIN Rail Option: DIN Rail Mounting, w

Series: 3 (JSY3000), Type: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 2 Stations, P,E Port, SUP/EXH Assembly: E (Internal Pilot, Built-in Silencer; D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: Direct Mounting, DIN Rail Option: DIN Rail Mounting, w/

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 4 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: Direct Mounting, DIN Rail

Cylinder with Lock

AB AH AO AT AU E R2 TG 0.2 TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

lateral load at rod end is exceeding the value in the graph, we recommend anti-lateral load type cylinder be used. 101 g 43 g 3 g 141 g W (Mounting orientation: Horizontal) 7-6-5 6 Series CQ2 (N) Theoretical Output (g) Weight Cylinder stroke (mm) Operating Operating pressure (MPa) Bore size (mm) 5 Bore size (mm) direction 0.3 75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41

Table of Contents

1 15-9-41 3 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

A

Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

KJ

19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 11.11 14.29 11.11 14.29 11.11 14.29 11.11 14.29 17.46 12.7 14.29 17.46 9.6 10 17.5 15.5 1 8 43 37.5 43.5 38 44 40.5 46.5 48.5 43.5 49.5 51.5 56 58 64.5 58 60 66.5 10.4 10 16 3 18 5 32 11.4 10 16.5 3.5 19.5 3 16 K 1 4 4.6 17 13.2 10 20.5 M H 5 16 6 18.5 15.2 12 23.5 D Connection thread (with seal) 17.46 3 8 7 21 17.9 17 25.5 MS 22.23 Courtesy