High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

LED Pressure Ramp Up Duration [sec] 0 0 1 0.1 F00 150 is the factory default value. Only the third digit of the LED display is displayed in hexadecimal. Therefore, "F00" represents "1500" in decimal, and the setting value is in units of 0.1 seconds. Pressure Ramp Up Duration will be "150 seconds".

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

150 With auto switch CA1 Number of auto switches S n Bore size 20mm 25mm 32mm 40mm CS1 Air cylinder with auto switch 20 25 32 40 2 1 n Without auto switch (Built-in magnet) Auto switch * Refer to the left table for selecting applicable auto switches.

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Electro-Pneumatic Positioner

Size M Size N Unit number Pilot unit part number Part number Orifice size Stroke 10 to 85mm (Accessory Nil) Actuator Capacity 90cm3 P368010-20 125 150 P565010-18 P36801080 0.7 35 to 100mm (Accessory E) 180cm3 P368010-21 110 195 P565010-19 P36801081 1 50 to 140mm (Accessory F) P368010-22 110 275 Fork lever joints (IP8100 type) Two types of the fork lever joints are available dependent upon

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

included with cylinder MDU Rail Mounting BMU1-025 Switch Mounting Screw, 2 Required (25/32/40/50 & 63 Bore) RSDQ Direct Body Mount BQ-1 (20 Bore) BQ-2 (32/40 & 50 Bore) Screw & Nut Kit included with cylinder Switch # Switch # Actuator Mounting Auto Switch Mounting Hardware (brackets,bands, screws & nuts) is identical to our CDS1 Tie Rod Mounting BT-12 (125/140 Bore) BT-16 (160 Bore) BT-18

α PneuAlpha HARDWARE MANUAL

Wiring Diagram. 14 4.5 AC Input Wiring. 15 4.5.1 AC Input Wiring Diagram. 15 4.6 Wiring Diagrams for the Sink/Source Terminals . 16 4.6.1 Source (+ Common) Input Wiring Diagram. 16 4.6.2 Sink ("-" Common) Input Wiring Diagram . 16 4.7 Output Relay and Transistor Wiring. 17 4.7.1 Relay Output Wiring Diagram (AC and/or DC). 17 4.7.2 Transistor Output (Source or + Common Only) Wiring Diagram. 18

q"s

Addilionally, reter lo the page 18 tor the set pressure lange by units of slandard measured pressure Additionally, reler lo page 18 as maximum set pressure differs on unit ol standard measure. Note 2) 2-wirc type 4 to 20 mA is not available. Power supply voltage (24 VDC or '12 lo 15 VDC) is rcquired Note 3) Selecl either analog oulpul or swtch outpul.

Compact

Especially, rust may be generated in an environment where water drops are likely to adhere due to condensation etc. 18 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4

5 Port Solenoid Valve Series SQ1000/2000

seals Type of actuation A, B port size 2 position 3 position 4 position One-touch fitting Effective area mm (Cv factor) Single/Double Double (Latching/ Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18

Flow Sensor Series PFMV

Settable range: 0.7 to 5.10 V Minimum unit setting: 0.01 V When using one-touch fitting, KJL04-M5 34.4 mm 10 mm Series PFMV3 Mass: 10 g Mass: 10 g Connectors Easy connection and removal of wiring 18 mm Power supply / Output connector Flexible cable Measurement flow range (l/min) Model PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 e-con connector Sensor

0.01

200 150 100 0 50 Supply pressure (kPa) Supply pressure (kPa) 870 Air Catch Sensor Series ISA2 Response Time (Typical example) Response time changes with detection distance and piping length.

MHS

16 M61 7.3 12 MHSJ3-80D MHSH(J)3-80D M81.25 18 16 MHSH(J)3-DAMHSH(J)3-DB Nm mm MHSH(J)3-32DA MHSH(J)3-32DB M50.8 3.2 10 MHSH(J)3-40DA MHSH(J)3-40DB M50.8 3.2 10 MHSH(J)3-50DA MHSH(J)3-50DB M61 7.3 12 MHSH(J)3-63DA MHSH(J)3-63DB M81.25 18 16 MHSH(J)3-80DA MHSH(J)3-80DB M81.25 18 16 10 MHSJ3MHSH(J)3 MHS2 Nm MHSJ3-16D MHSH3-16D M30.5 0.88 Nm MHSJ3-20D MHSH3-20D M30.5 0.88 MHS2-16D M30.5

LEF-OM006xx

8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 2 100 500 100 500 1 1 200

Plug-in/Plug Lead: Single Unit

None 9 22 SOL.B 18 () (+) Gray None 5 stations 10 .