VZ5000

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MTS Air pressure supplied from A operates on both surfaces q and w. (Extension) MY q w A B Piping is concentrated in the head cover. CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Air pressure supplied from B operates on surfaces e.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Holding force 25 320 N 32 500 N 40 800 N MLGC Shock absorber can absorb small to large impacts without adjustments due to self compensation. CNG MNB Brake construction is designed not to allow loads on guide.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Holding force 25 320 N 32 500 N 40 800 N MLGC Shock absorber can absorb small to large impacts without adjustments due to self compensation. CNG MNB Brake construction is designed not to allow loads on guide.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

800 N Holding force 320 N 0.43 0.68 1.

Clamp Cylinder Series CK1

Speed controller valve Top width across flats 3 45 W 30 17 10 10 45 M16 x 1.5 14 3 45 Hs 30 IA IB 40 35 4 x M6 Thread depth 2 20 38 Width across flats 17 R15 F Shaft: 12 Hole: 12 0.050 d90.093 +0.027 H8 0 97 80 + Stroke 192 + Stroke Unit: mm Clevis width CKG1A: 16.5 CKG1B: 19.5 +0.3 0 +0.4 0 Symbol F IA IB N S W Hs Bore size 40 40 50 63 44 52 47 52 55 5 45.5 55 60 58 49 58 5.5 51 57 69 74

7

52 2 x Speed controller valve Top width across flats 3 20 17 30 45 W 10 45 14 11.5 3 M16 x 1.5 45 Hs 30 IA IB 40 35 20 38 Width across flats 17 4 x M6 Thread depth 12 F R15 0.050 d90.093 +0.027 H8 0 Shaft: 12 Hole: 12 97 78 + Stroke 190 + Stroke Clevis width CKG1A: 16.5 CKG1B: 19.5 CKG1C: 12.5 Unit: mm +0.3 0 +0.4 0 +0.5 0 Symbol F IA IB N S W Hs Bore size 40 50 63 45.5 5 53 52 47 52 44 40

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Assembly of check valve body assembly, check valve cover and 2 screws 706 Direct Operated Precision Regulator/Modular Type Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A ARJ AR425 to 935 ARX 1 I N 2 OUT AMR C SM ARM ARP ARP A IR IRV w w VEX SRH Inlet pressure (IN side) Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Assembly of check valve body assembly, check valve cover and 2 screws 764 Direct Operated Precision Regulator/Modular Type ARP20/30/40 Series Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A ARJ AR425 to 935 ARX 1 I N 2 OUT AMR C SM ARM ARP ARP A IR-A IR w w IRV VEX Inlet pressure (IN side) Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber

PF2A/PF2W

Flow rate conversion PF2 NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3 kPa Standard state: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these states.

2-Color Display Digital Flow Switch Series PFM

(2 or more) switches (horizontal) 1 pc. 24 or more 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less Secure mounting of n (2 or more) switches (vertical) 24 or more 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less.

VDW Series

Refer to pages 11 and 12 regarding manifold additions. 8 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 Dimensions (mm) 1in = 25.4mm VV2DW2 15 ( 25.5) 1 11 Approx. 300 16 4.6 1 24 33 (19.5) 19.5 R2.3 2-1/4 (IN port) 9 4.5 L1 (: Thread type) L2 L3 1 Stations D side 2 3 4 5 n U side VDW23-*G-* VDW23-*G-* VDW23-*G-* VDW23-*G-* 68 31.5 21 18.5 n-M5 x 0.8 n

Modular Style Regulator with Built-in Pressure Gauge Series ARG

When the inlet pressure (P1) is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1). When the inlet pressure (P1) is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released into the inlet side (Figure 2).

EX510

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

HRX-OM-O021

HRS 20 A 050 Cooling capacity Option 050 4700W/5100W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type W Fixed SI unit() *1) Unit : MPa/ (degree Celsius) Piping thread type Power supply Null Rc 20 1-phase AC200 to 230V(50/60Hz) F G (PT-G conversion fitting is included) N NPT

Square Tube Type Air Cylinder Series MB1

Stroke S + Stroke H A F N N C B Cylinder tube sectional view B-B' Width across flats Stroke range Bore size (mm) Effective thread length C B G F E A H ZZ W V S P N MM J MB 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 84

CNG

[Vertical] Cylinder internal resistance (N) 24.6 Cam operating torque (standard) (Nm) 1.0 Max. cam operating torque (Nm) 2.3 Bore size (mm) Applicable hex. wrench size [Load in the direction of rod extension] [Load in the direction of rod retraction] 20 25 32 40 Size 3 W 38.2 2.5 4.7 Size 3 62.7 3.0 4.7 Size 3 SOL.C 98 4.0 8.2 Size 4 SOL.C 4.

Speed Controller: Standard Type Series AS In-line Type

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

HRX-OM-W058

L PE N N For option B PE L PE N L Fig. 3-6 Wiring of power supply cable(Thermo chiller side) 3.3 Installation HRS-R Series 3-12 HRX-OM-W058 Chapter 3 Transport and Setting Up Wiring 1. Connect the power supply cable to the secondary side of the earth leakage breaker and grounding.