3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201FSl, AS4211FSl AS3201FSl, AS3211FSl 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 1500 1000 08, 09 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 10, 11 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate

MHL2

Wide Opening Air Gripper Series MHL2 Parallel Style/10, 16, 25, 20, 32, 40 How to Order D 16 MHL 2 1 Y59A S Wide opening Number of auto switches 2 1 n S 2 fingers 2 Numbers of fingers n Bore size 10mm 16mm 20mm 25mm 32mm 40mm 10 16 20 25 32 40 Auto switch Without auto switch (Built-in magnet) Auto switch specifications Action Load voltage Auto switch model no.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30-02BG For 0.4 MPa setting 1 l/min (ANR) or less (at P2 = 0.4 MPa) Air consumption Ex.) ARP30-02BG-1 For 0.2 MPa setting 0.6 l/min (ANR) or less (at P2 = 0.2 MPa) Ex.)

Rotary Table

Grease pack part noGR-S-010(10g) 36 - Disassembly procedure (1) Loosen hexagon socket head cap screw and pull out the table.

Rotary Table

Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 27 - Kinetic energy Table 9 shows the allowable kinetic energy of the rotary table.

Vacuum Ejector with Solid State Timer, Series ZMA

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

Vacuum Ejector with Solid State Timer

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

Function: 2 (2 Position Double), Piping: 4 (Base Mounted 5 Port), Exhaust: 3 (Common), Specifications: Standard, Voltage: S (5VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M5 (Base Mounted M5 w/Sub-plate), Option: None, CE Marked: Q (CE Marked)

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F

Slit Valve

O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM, Kalrez 4079 (Option) Seal material Bellows AM350

PS1000/PS1100

) 2-wire system (For vacuum and residual pressure) L 3 m Air/Non-corrosive gas Fluid 11 ON: When red LED turns on Indication light Piping specifications Temperature characteristics R06 6 reducer 3% F .S. or less Switch Specifications 1% F .S. or less Repeatability 0.4 4% F .S.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

NAN200,400 NAN500 -900 4.21 11071 NAN120-X200 Port size (NPT) M5 (NOM 10-32) Noise reduction lvax. operating pressure I 45 PS(10.2kg7c.rf) 40140.F (s -60.C) Operating temprature range Effective orifice mm2 (Cv) 5 (0.27) 20 0.1) .12 (3.3) \4/eight oz (g) 0.69 (17) Dimensions In.

SY3000-OMH0002

(N.O.)3 8 No.SY3000-OMH0002 SY series .3.23.7mm ( ( (1mm) (R) (U) DC24V 12V 1/4 DC24V 62ms L M () (S) 0.5V (Z) () 9 No.SY3000-OMH0002 SY series DIN W 1 3WA +4-3 (DS) (Z) DIN M8 ( ) DC24V 12V 1V WA (FU) +COM (S) (Z) (R) (U) (SS5Y(3,5)-45)-COM (SS5Y(3,5)-45N) 4 (WA ) (S 3( WA ) L M (GZ, LZ, LOZ, MZ, MOZ) 4 (WA ) 3( WA ) DIN (DZ, YZ) 4 WA 3 WA 4 (WA

Two Hand Control Valve

Two Hand Control Valve VR51 Series RoHS An output is available through synchronized, twohanded operation (within 0.5 s)!

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Magnet Gripper

x 0.8 Thread depth 7.5 Auto switch mounting groove on workpiece release side 4 x M5 x 0.8 Thread depth 7.5 4 x M5 x 0.8 Thread depth 7.5 Rc1/8 4 x 29 Auto switch insert area 15 15 15 17 (Workpiece adsorption port) 6.4 6.4 58 6.4 74.2 A (Refer to the figure below.) 6.8 66 58 58 Auto switch mounting groove on workpiece adsorption side Rc1/8 (Workpiece release port) Bumper (9.8) (26.5) (25.1