3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT661-12A VQ VQZ Pilot valve assembly VZ VQ11 5 G 1 VS Series VQZ100 0 VQZ200, 300 1 Function Symbol Specification DC (1.0W) AC Standard High pressure (Metal seal only) (1.0W) (1) K Electric entry (0.5W) Y Low wattage Light and surge voltage suppressor Without Electrical entry Symbol (1.0W) Latching (3) L G L LO M MO Y YO YZ YOS Grommet (DC specification) L plug connector with lead wire

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Symbol Specification DC (1.0W) AC With light and surge voltage suppressor. (3) Standard (1) High pressure (Metal seal only) (1.0W) K (0.5W) Y Low wattage (2) R External pilot Note 1) Option Note 2) Refer to p.2.10-38 for details about external pilot specification. Note 3) Refer to p.2.10-26 for power consumption of AC type.

High Power Cylinder Series RHC

241 M10 x 1.25 195 3/8 32 75 62 55 6 M33 x 2.0 25.4 22 52.5 47.3 292 41 11 30 25 251.5 M14 x 1.5 201.5 6.8 to 11.3 3/8 40 50 to 100 EA H EA FA GA A NE Rc P Rc P GA M Effective thread K WH ND H1 MM I C B D E LY 4-LD LH0.2 LT JC Y X JC Y X S + Stroke NF LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 50 H1 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70

HRX-OM-W032

Connection port Sealant Note: When using the Y strainer of the accessory, fasten it on the return port. Clean the filer of the strainer after the trial operation before starting the proper operation Sealant Barrel nipple 25A Y strainer 25A Arrow direction of Y strainer Connect the strainer so that the screen faces downward.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

How to Order EX500 ACY00 S Relay output module and Y type connector wiring example Y type connector Relay output module 2 2 4 Coil 4 Output A 1 Coil Output B 2 3 4 260 Manifold Option 10-SV Manifold Option Blanking plate assembly Used in situations where valves will be added in the future.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

HRL

Users system side To the thermo-chiller 24 VDC +24 VDC (Output) 1 2 +24 VDC (Input) EXT 24 VDC EXT 24 COM Power supply 14 24 COM (Output) 24 COM Run/Stop When using a user s power supply, connect the 24 VDC + side to pin 2 and the COM side of each contact input signal to the users power COM. 3 4.7 k External switch 16 4.7 k Operation mode request (Momentary) 4 4.7 k 24 VDC 6 Power supply

Cylinder

Y .. ".,.. , ",. ,." ,. ,." , .. .' .

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

SFOD-OMT0009CN

J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250 150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14 () 109 No.SFOD-OMT0009CN-B 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 [mm/s] 1100 1400 1500 [mm/s] 48 () [mm/s] 78 () 1.6 LER LER10 LER30 LER50

JXCx-OMT0001CN

J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 mm/s 1100 1400 1500 [mm/s] () 48 [mm/s] () 78 1.6 LER LER10 LER30 LER50 J K

Compact Cylinder with Air Cushion Series RQ

Clevis pin and snap ring are included in the package. 8 Series RQ Accessories Single Knuckle Joint Double Knuckle Joint For I-G02, I-G03 For I-G04, I-G05 For Y-G02, Y-G03 For Y-G04, Y-G05 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 L MM MM MM NDH10 NDH10 L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Rolled steel Material: Cast iron

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Function Symbol Specifications DC (1.0 W) AC Electrical entry Nil Standard type High pressure type (Metal seal, VQZ100 only) Light/Surge voltage suppressor (1.0 W) (1) K Electrical entry Symbol (0.5 W) Low wattage type G L LO M MO Y YO YZ YS No Y Grommet (DC specifications) L plug connector with lead wire L plug connector without connector M plug connector with lead wire M plug connector

REC

A lNA F AL 2-NN Relieving port M5 X 0.8 Standard port H1 H2 I Width across flats B1 Relieving port D C B 4-LD LH MM 2-4 3.2 N N X X Y S+Stroke Y LX Z LS+Stroke LZ ZZ+Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10

REC

A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

L NZ RR1 NX E1 L1 MM U1 ND A1 Cotter pin Polishing ball 12 Y-04C 40 16 +0.3 +0.1 38 M14 X 1.5 12 22 24 55 13 25 55.5 3 X 18l Polishing ball 12 Y-05C 50, 63 +0.3 +0.1 16 38 M18 X 1.5 12 27 28 60 15 27 55.5 3 X 18l Polishing ball 18 Y-08C 80 +0.3 +0.1 28 55 M22 X 1.5 18 37 36 71 19 28 76.5 4 X 25l Polishing ball 20 Y-10C 100 +0.3 +0.1 30 61 M26 X 1.5 20 37 40 83 21 38 4 X 30l 83 Knuckle pins

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

CXS

L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and the end of the plate 20 6mm 25 32 8mm (Example) When using CXSM20-10 and L = 10mm: Imaginary stroke L' = 10 + 6 + 10 = 26 Therefore, the graph used for your model selection should be the one for CXSM20-30 ( , ). 61 Series CXS Vertical Mounting [based on maximum speed (V)] Graph V = up to 200mm/s 1 Graph V = up to