Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

Modular Type Lubricator Series AL

40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Compact Vacuum Ejector Series ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Thermoelectric Bath

connector Communication connector Power connector Power switch RUN LED TROUBLE LED 165 Series HEB Dimensions Liquid tank 7.9 (200) 8.1 (207) WARNING Warning label 13.1 (332) WARNING Signal connector Model no. label Signal cable SIGNAL DC cable THERMO-CON IN DC 3.3 (83) OUT 1.6 (41) 1.2 (30) 1.2 (30) 1.6 (41) 1.9 (49) 1.0 (25) 5.8 (148) 5.4 (138) 5.4 (138) 0.35 (9) (8.0 (204)) 0.59 (15) 7.8

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Peltier-type Chiller Thermo-con/ Compact Type

D-G

Style: Pressure Switch w/ T-Spacer, Body Size: 20 (AC20), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC20, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 5m, Pressure Unit of the Scale Plate: MPa

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

DOC1003626

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.