HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

VFR5000-OMN0001

P A B 10 VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax:

AME

E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

D Key-lock function This function prevents operation errors such as accidentally changing setting values. E Zero-clear function This function clears and resets the zero value on the display of measured pressure.

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

Example) AW30-03C-2R-X2622A y t r e w q Stainless steel 316 specification Symbol Description K q Body size 30 40 IP K w Thread type Nil Rc N NPT F G + IW 02 1/4 03 3/8 04 1/2 06 3/4 + 1301 K e Port size AW AW IL1 K r Option i a Float type auto drain Nil Without option C Note 1) Float type auto drain (N.C.

IDX-OM-Y002

IDF60/70/80/90 Series 5.2 Regular maintenance 5-7 IDX-OM-Y002 Chapter 5 Checks, Maintenance and Adjustment (D) Replacement of the main valve (discharge valve) Purchase the replacement kit of the main valve and replace it referring to the attached Replacement Procedure. Replacement requires a specific tool.

AW20-B to AW60-B

Option Note 4) D Note 7) N.O. (Normally open) Drain port is open when pressure is not applied.

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)

IDX-OM-X011

Connected A B C D E F G H I J IDF190D JIS10KFF 80A(3B) flange 750 1510 1320 375 480 600 700 800 355 427 IDF240D JIS10KFF 100A(4B) flange 770 1550 1640 385 703 730 700 800 355 467 Auto drain is included in the package.

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

Series IDK Moisture Control Tube

D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes. Made to Order If you require the moisture control tube with an effective length not listed in the above table, please contact SMC. 1

VH Series, 4 Way Hand Valve

/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 type VH300 type VH400 type 8 Panel Mount/Dimensions Series VH (mm) / Panel mount type Dimensions VH41 -N02/N03/N04 VH41 -N06 Scale: 35% 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 107.5 19 102 46.6 46.6 88 81 94 148 144 97 97 67 1.5 65 1.5 123 105.5 25 3 (R) 3 (R) 1 (P) 1 (

Series PFMC 3-Color Display Digital Flow Switch

Port size Rated ow range 501 102 202 04 1/2 V V 06 3/4 V Note 7) Each option is not assembled with the product, but shipped together.

Air Suction Filter With One-touch Fittings

Operating and ambient temperature range 0oC to 60oC No freezing Filtration accuracy 30m Filtration efficiency 95% Element replacement differential pressure 20kPa Applicable tubing material Nylon/Soft Nylon/Polyurethane Note) Alcohol, acetone, etc. also cause damage, so be sure for the product not to be close to them 2-3 Dimensions Size Model A B C D E F G H I J K L M N ZFB100-04 53 4 ZFB100

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

from the D side.

FREE MOUNT CYLINDER

(mm) Model 6 10, 16 20, 25, 32 Single rod C(D)U*-*D 0.12 0.06 0.05 Double acting Standard Double rod C(D)UW*-*D 0.15 0.10 0.08 Single acting Single rod C(D)U*-*S, T 0.2 0.15 0.13 Single rod C(D)UK*-*D 0.15 0.10 0.08 Double acting Non-rotating type Double rod C(D)UKW*-*D 0.18 0.13 0.11 Single acting Single rod C(D)UK*-*S, T 0.23 0.18 0.16 1-2.

NAR Series

C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A t e n n o B C D A r e b m a h C F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A e d i u g e v l a V F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A F A 2 C A F A 2 C A F A 2 C A ) f g k (

Ionizer

Model with 40 mm-pitch emitter cartridges Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Part no.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

plated M J NBR, Stainless steel 304 D I G F E C Connection thread B A Barb One-touch: M-32F-2, M-04F-2 Applicable tubing (mm) Weight (g) A B C D E M1 M2 Model (O.D. / I.D.)