CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

High Purity Fluoropolymer

P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

e r t i i o o !

Direct Solenoid

Direct Solenoid Series NVS 3105, 4014/ 402/3/ 4/ 54 ,.,4:,.t .,r".,,,. 't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.'

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

Air Cylinder CP Series Cylinder Positioner Assembly

Clevis T Trunnion Service N Non-Lubed Accessories Bore Descriplion 50mm 63mm 80 mm 10O mm FodSgl. Clevis t-05 r-05 t-08 t10 Rod Dbl.

Table of Contents

Single Acting, Spring Return (S) Without auto switch: CU-S Single Acting, Spring Extend (T) Without auto switch: CU-T Standard Double Acting, Single Rod Without auto switch: CU-D (N) (N) (N) Model Model Model Stroke (mm) Stroke (mm) Stroke (mm) 5 10 15 20 25 30 40 50 60 70 80 90 100 5 10 15 5 10 15 CU6 CU10 CU16 CU20 CU25 CU32 CU6 CU10 CU16 CU20 CU25 CU32 CU6 CU10 CU16 CU20 CU25 CU32 0.085

HRX-OM-M090

Allowable voltage range 10% Circuit protector17 A 10 (For option -T-MT : 15 Electric system Applicable earth leakage breaker capacity9 A 10 (For option -T-MT : 15 (50/60Hz) A 4.6/5.1 4.7/5.2 5.1/5.9 Rated operating current4 For option -T-MT : 5.6/6.7 For option -T-MT : 5.7/6.8 For option -T-MT : 6.1/7.5 consumption4 (50/60Hz) kVA 0.9/1.0 0.9/1.0 1.0/1.2 Rated power For option -T-MT : 1.1/

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S

q"s

S o.o t o.t 0.0 25 50 75 Inpul signal (%F.S.) o 25 50 75 100 InPUt signa ("/.F.S.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Refrigerated Air Dryer

S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) Single acting, spring extend CQ2B16-T-PS CQ2B12-T-PS 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS CQ2B20-T-PS Set of left nos. !4, !5, !6. CQ2B25-T-PS CQ2B40-T-PS CQ2B32-T-PS CQ2B50-T-PS Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

VNB

G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

Compact Type Dual-Rod Cylinder Series CXSJ

5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

Magnetically Coupled Rodless Cylinder

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Floating Joint

force (N) Center of sphere R Standard: Heavy Load Type Hydraulic: Up to 7 MPa M A Allowable eccentricity U Maximum thread depth P Weight (kg) B C D T J G H JAHF40-16-150 JAHF50-20-150 JAHF63-24-150 JAHF80-30-150 JAHF100-39-150 JAHF100-48-150 40 50 63 80 100 100 9000 14000 22000 36000 55000 55000 16 20 24 30 39 48 50 62 72 82 100 100 50 59.5 66 79 96 96 15 18 21 24 29 29 75 100 100 125 150