SY

0 is included.)

Thermo-con

0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) 148 Series HEC-W Peltier-Type Chiller Thermo-con (Water-cooled) The values shown on the performance chart are not guaranteed, but typical.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Temperature Monitor unit p2%F.S.(15 to 35oC) p5%F.S.(0 to 50oC) (15 to 35oC) p2%F.S.(15 to 35oC) p0.5%F.S. p5%F.S.(0 to 50oC) p2%F.S. p5%F.S. p5%F.S.(0 to 50oC) (0 to 50oC) (0 to 50oC) (PF2A7<0 to 50oC) p1%F.S. Repeatability p1%F.S. p1%F.S. Monitor unit (PF2A7<0, p1%F.S. (Fluid: Dry air) Analog output: (Fluid: Dry air) Analog output: p0.1%F.S.

Pilot Operated

0.032 MPa for a 25 orifice (VXD226 ). 1,000 VXD2392 0 50 Cv = 49 2 0 2 0 2 0 500 VXD2382 0 40 Cv = 31 400 VXD2262 0 25 Cv = 12.5 VXD2272 0 35 Cv = 23 300 VXD2152 0 20 Cv = 9.5 200 Flow rate Q l/min (ANR) 100 VXD2142 0-04 15 Cv = 5.5 VXD2142 0-03 15 Cv = 4.5 50 40 VXD2130-04 03 10 Cv = 2.4 30 VXD2130-02 10 Cv = 1.9 20 10 0.02 0.03 0.032 0.04 0.05 0.055 0.06 0.07 0.08 0.09 0.1 0.16 0.2 0.3

SMC Basic Pneumatics

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

46.5 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by tube diameter (mm) ZPR32F-0-B5 M5 x 0.8 Q: 4 Q: 6 13 16 29.8 47 32 35 Pad diameter (mm) ZPR32F-0-B8 M8 x 1.25 R 20.6 R S 12.8 S Dimensions by tube diameter 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S 20 to 32 12.8 26.2 ZPR 40/50 F-0-B8 (Without Buffer/Female Thread) S Width across

Vacuum Pad: Ball Joint Type

width across flats 3 E D C 3 2 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke A (mm) B C D E F H I J Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 126.5 ZPR25F10-0-A14 25 28 50 ZPR32F10-0-A14 13 16 29.8 59 47 32 35 127 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model H I J R S R S Stroke ZPR20F10-0-A14 20 +10 3 0 ZPR25F10-0-A14 30 +20 +7 12.8 24.3 15.2 26.2 ZPR32F10-0-A14

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

EXxx-OMU0020CN

EX245-SPN1 16 Valves (16 coils)32 Valves (32 coils) 2 2 4 D 0 1231 0.X byte Valves (16 coils) Valves (32 coils) 0 Valve coils 0-7 Valve coils 0-7 1 Valve coils 8-15 Valve coils 8-15 2 Valve coils 16-23 3 Valve coils 24-31 . 6-2 46 No.EX-OMU0020CN 6.4.

HRX-OM-X037

Input 2 Off Detect 0 to10sec 0sec Operation stops during alarm By default Serial communication setting 2.

LG1H

10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

%silltr

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

Cylinder with Lock Series CLS

0 i o @1 @0 @3 q w !9 %7 $1 $2 $3 $6 %2 %3 %4 %6 $8 $9 ^6 $0 #3 y u !1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.

High Purity Chemical Valve

Valve type Port size 0 N.C.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.03 0 19.5 (Extension end adjuster) 2 x M2.5 x 0.45 thread depth 3 Bottom view of MXQ6L-30 13225.5 7 I J 4 6 Vacuum suction port M5 x 0.8 3 20 16 13 Max. 10 (Retraction end adjuster) 2 6 Operating port 2 x M5 x 0.8 3H9 ( ) depth 2.5 +0.025 0 HA GA NN x M4 x 0.7 thread depth 8 4 A B 3H9 ( ) depth 2.5 +0.025 0 1 12 7 7 3.2 3.2 6.3 A B H G (NN 1) x H 10.5 5.5 10.5 5.5 A-A B-B (mm) Model

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

HRX-OM-R016

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

A_HEC-OM-I009

P V < 2 3 . 0 C # 1 8.6.1 Setting mode, Level 1 S V 2 5 . 0 C M O D E 1.

Flow Control Equipment

0 5 10 0 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) Note) "-U10/32" is the same as "M5".

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400