Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Double acting 0.15 to 0.6 0.1 to 0.6 10 to 60C Operating pressure (MPa) Ambient and fluid temperature Repeatability Lubrication Effective gripping force (N) at 0.5 MPa Note) One side 10 0.1 Not required 14 45 74 131 228 396 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 4 Grease Cleanliness class (ISO class) Note) Gripping

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Model Gripping force per finger Gripping force Note 1) Open/ Close stroke (Both sides) mm Bore size mm 10 16 20 25 Note 2) Weight g Model External Internal 60 125 250 455 4 6 10 14 17 40 66 104 9.8 30 42 65 11-MHZ2-10D 11-MHZ2-16D 11-MHZ2-20D 11-MHZ2-25D In-line electrical entry Lead wire type Explanatory drawing L Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

7

U E OUT T OUT IN M 2 x P Port size J K L F I (D) (mm) Electrical entry M Model Flat terminal Conduit terminal Conduit C37, Stainless steel body Port size P A B C E F I J K L D Aluminum body T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U 49.5 (55) V U T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-01-B 8 ZPX80HB-01-B10 M8 x 1.25 M10 x 1.5 50 52 36 54 24 50.5 72.5 16.5 80 83 58 85 37 63.5 85.5 27.5 35.5 48.5 -B10 -B12 M10 x 1.5 M12 x 1.75 ZPX HB-B01-B (Female thread) 100 125 1/8 (Rc, NPT, NPTF) I Hexagon width across flats 21 11 70 Width across flats 60 4 x M5 x 0.8 11 H G F E Y 4 40 C A B D Dimensions (mm) A B C D E G H I Y F Model ZPX100HB-01-B10 M10 x 1.5 100 103 69 107 47.5 75.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-29-11 12 Series CXS Specifications Precautions Bore size (mm) 25 20 32 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Port size Bearing type Cushion Air (Non-lube) Be sure to read before handling.

MXH

Operating Range Bore size (mm) Auto switch model 6 10 16 20 5 6 9 11 D-F9W/F9WV D-M9/M9V D-A9/A9V 3 (2) 3.5 (2) 5.5 (3) 6.5 (3.5) Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.) There may be the case it will vary substantially depending on an ambient environment.

EXxx-OMO0027

Reload I/O Devices : The display above shows an example of the software configuration structure of the EX600 series. : Allocate the diagnostic data to Module 11 when its setting is other than the diagnostic mode 0.

EX600-DX_DY_DM_eng

4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10 13 12 7 6 5 7 6 5 Group Group Pin number Pin number Pin number 3 3 1 0 1 0 2 2 13 11 13 11 12 12 10 10 8 6 8 6 5 3 1 9 7 9 7 4 2 5 3 1 5 3 1 4 2 4 2 Pin number Pin number 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 4 3 2 1 EX600-DMPE EX600-DMPF EX600-DYPE EX600-DYPF 0 V (output) 24 V (output

Digital Flow Switch ( compatible)

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit N Normal condition (NOR) Reference condition for volumetric flow: 101.3 kPa, 0 C The flow measurement which is converted at normal atmospheric pressure conditions at 0 C.

Digital Flow Switch ( compatible)

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit N Normal condition (NOR) Reference condition for volumetric flow: 101.3 kPa, 0 C The flow measurement which is converted at normal atmospheric pressure conditions at 0 C.

PFxx-OMX0007

No.PF-OMX0007-A PRODUCT NAME Digital Flow Switch (Modular type) MODEL/ Series/ Product Number PF3A701H PF3A702H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Names and Functions of Individual Parts 11 Definition and terminology 14 Mounting and Installation 16 Piping method 17 Wiring 19 Change the Function Settings [Function selection mode] 27 Function selection

XLA Series

55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

XLA- ∗ -F7NJ ∗ - ∗ Series

55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XG_-OMV0028

9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4. 4-1.

Compact Rotary Actuator

Additionally, note that the 12 VDC relay does not apply to the auto switch. -11- 11. Pay attention to leakage current. <2-wire type> Current (leakage current) flows to the load to operate the internal circuit even when in the OFF state.

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

Low-Speed Rotary Actuator

Additionally, note that the 12 VDC relay does not apply to the auto switch. -12- 11. Pay attention to leakage current. <2-wire type> Current (leakage current) flows to the load to operate the internal circuit even when in the OFF state.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

LEJ-OM004xx

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.