SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Air Slide Table Series MXJ

(Not plugged in the case of the clean series) 17 12 5 37 43 3 +0.03 0 depth 1.5 11 17 17 A D14 -X 3 2.5 2.5 3.5 A 4.8 Individual -X 3 +0.05 0 depth 1.5 4 x M3 x 0.5 A-A 177 Series MXJ Dimensions With stroke adjuster With adjuster on both ends MXJ4-CN With adjuster on extension end MXJ4-CSN 8 End plate 0.5 Note) Width across flats 4.5 Max. 6.5 3 With adjuster on retraction end MXJ4-CTN 4 8

ZQ

Connector type Lead wire length: 3 m CL Nil Y Standard type (1 W for DC) Note) DC low wattage type (0.5 W) Connector type Without connector CN Note) In the case of the manifold type or when single unit valves are aligned closely with each other, avoid energization lasting more than 3 days.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type.

ZR

ZR1--CN . 1 pc.

CP95

R H SR (max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2

Rotary Table Series MSU

MSUA 1 MSUA 3 MSUA 7 MSUA 20 1 3 7 20 Electrical entry/Lead wire length Grommet/lead wire 0.5m Grommet/lead wire 3m Connector/lead wire 0.5m Connector/lead wire 3m Connector/without lead wire Nil L C CL CN Rotation Symbol Application Rotation Available only with R73, R80 and T79 type connectors Lead wire with connector part nos.

ZSE3/ISE3

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type. Please refer to page 16-4-5 for figure.

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nozzle diameter C C CN Lead wire length 0.6 m Lead wire length 3 m No lead wire 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm ZL Refer to Table (2) for lead wire with 4-wire connecor.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

IDX-OM-W034

CN TB2 PRS For IDFB37E IDFB55E/75E-46 SYMBOL DESCRIPTION Refrigerating Compressor FM Fan Motor FM1 to 6 Fan Motor OLR Overload Relay C1 Capacitor For Compressor Motor C01 Capacitor For CM ILS Switch with Lamp PRS Pressure Switch PRS1 Pressure Switch PRS2 High Pressure Switch TB Terminal Block TB1 Terminal Block TB2 Terminal Block MC Magnetic Contactor MC1 Magnetic Contactor MC2 Magnetic

CP95

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) E B1 B2 B3 TG1 T I2 FL d2 d3 CN R H SR (max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S

SMC

Cn is rounded down to the nearest whole number, using no more than three significant figures.

Rotary Table/Vane Style Series MSU

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m Nil L C CL CN 90 180 90 180 Single vane Double vane 90 90 Rotation adjustment range Single vane: Both ends 5 each Double vane: Both ends 2.5 each Vane type Auto switch S D Single vane Double vane Nil Refer to the table below for the applicable auto switch model.

LC-OM089xx

ON: A-PHASE direction 4 A-PHASE Input moving direction Off: B-PHASE direction ON :Adjusted thrust (Set range 10 to 70%) ON: Motor output 2 ON Output ON Comm. input OFF: No motor output CN3 Motor output terminal CN Power supply terminal CN2 Control terminal Directional control equipment does not have an emergency stop or power on/off switch.

Air Cylinder CP Series Cylinder Positioner Assembly

Slroke = 0.7S' (20mm) wilh Boot Mil lmele6 in Pa.enthess CPA1 CN BOD BOOT w/o Boot withBool r SORE A D O ,GB J K MM N P RR s CD cx tl z z. n z zz 50mm 1.38 (35) 2.76 t70) 2.O5 152l c 7 9 t20\ 1.57 a44l 0.39 i10t 0.67 117\ Mx1.25l.2B t7l 1.38 (35) 1 . 1 8 (30) t12\ 3.54 t90) 1.75 a19l o7t ;lli 2 2 6 {58) 7.20 11831 7.68 lt 95) 2,05 ts2) 1 1 2 \ 2.40 (66) s T o K E 7 5 2 ' 1 9 1 ) 7 9 9 1203J