Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

Type: -, Cooling Method: -, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set)

Free-Mounting Cylinder with Air Cushion Series CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Compact

switch into the groove from the top before holding the product) (When mounting an auto switch into the groove from the top after installation) Auto Switch Proper Mounting Position [mm] Auto switch model Bore size D-M9, D-M9W D-M9V, D-M9WV D-M9A D-M9AV A B W A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

10

A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.

70pvvna

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

0.01

to 60 (No freezing) Dustproof and jetproof (Equivalent to IP65) Environment with no corrosive or explosive gas 0.2 or less Free 30/150 or less 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) 10% rated voltage B type VCA2: 6.5 W Valve type Fluid Withstand pressure MPa Body material Seal material Ambient temperature C Fluid temperature C Enclosure Atmosphere Valve leakage cm3/min (ANR) Mounting

Electric Actuator Triple Axis P&P Unit

E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 12 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 39 L 130 4H10depth5 4-M6 x 1depth14 4-M8 x 1.25depth18 80 31 5 4H10depth5 92 B section detail (S=2/1) B (Stroke+145) 25 18 (52) Stroke+188 (92) 10 10 Stroke+240 60 2 60 31 62.5 Reference plane 130 63.5 3 40 (Refer to

1

H B Part no.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch

VXR21/22/23

Allowable voltage fluctuation is 10% of the rated voltage.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

180

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =