Direct Solenoid

Mtrual opralor assmbly $llh Odng PA0@1 PBO{01 I 1 Raplacdr3nl coll only-4.C. sol6nold 1Al0 aot@ 1O/@ cl2A{9 cl2A-10 cl2A.1t 10 I Sol6noi, aBsmbly-4,C. conplst wllh coll, 120/ao 24(m0 a0,t0 @14O9 @ta-10 cora-1t At2A{9 412A,10 1 l '| NXT01010 NXT0307.3 12 1 NXTO1G12 NXTO1G12 13 @t|vo scr6w .nd locl wa5hsr xTt)10-21 xT010.21 DIRECTIONAL AIR YALVE MANIFOLD ASSEMBLY SERIES NVS 3115, 3125 NVS 3135

ZP

ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.

MX-OMP0051

RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6

RQ

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) YB-05 50, 63 11 60 120 22 6.5 12 YU-03 32, 40 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YB-08 80 14 75 230 28 8.5 16 YU-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 YB-10 100 18 90 455 36 10.5 18 YU-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 7-7-15 15 Series RQ Proper Auto Switch Mounting Position (Detection

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

Rotary Table/Vane Style Series MSU

Refer to pages 796 and 797 for detailed solid state auto switches with pre-wired connectors. 150 Series MSUA Rotary Table: High Precision Type Vane Style Specifications MSUA1 MSUA3 MSUA7 MSUA20 Model 2 Single vane Vane type Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Fluid Air (Non-lube) Proof pressure (MPa) 1.05 1.5 5 to 60C Ambient and fluid temperature

Microspeed Cylinder

Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches

HRX-OM-W002

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR012-A-10/20Approx.2 40 20 HRR018-A-10/20Approx.4 70 40 HRR024-A-10/20Approx.5 90 50 HRR030-A-10/20Approx.6 100 60 3.2 Installation

240

Dimensions [mm] Model L1 L2 L3 A B C D E F G J LEPS6-25 127.1 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6-50 156.6 169.6 13 22 45 30 52 22 52 60 107.4 393 LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 Size PAX C D, T G, C T

Manifold Specifications

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

SFOD-OMT0005CN

(P.12) -80- 5(P.23) 9.1 (P.32) 3.4 (P.16) 10.(P.41) (CN1: EMG OFF 3.(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

SMC Pneumatic Clean Series

flange style B L F G Bore size (mm) Port thread type Rc NPT G Nil TN TF 10 C D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc.

Fieldbus system EtherCAT compatible SI Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V Selects the analogue input range. (AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

LEF-OM006xx

INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 30[mm] No.1 No.1INC 10INC) C :10(INC) 50[mm] 0 10 20 30 40 50 [mm] [mm] -10INC) C :-10(INC) 10[mm] 0 10 20 30 40 50 [mm] [mm] -24- ) 1. 2. 3.No.1 4.No.2 5. 1 SVON(ON SVRE(READY 2 SETUP SETON INP(IN ) OUT0 OUT1 OUT2 3)4) OUT3 OUT4 OUT5 INP BUSY IN0 IN1 IN2 IN3 IN4 IN5 DRIVE 3)5) No.1 3 OUT0 OUT1 OUT2 3)

HRX-OM-M005

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Air cylinder

4 0 4 0 10.5 7 10 6.5 40 10 10 14 14 7.5 7.5 7.5 7.5 7 7 4 4 4 4 10.5 10.5 10 10 50 11.5 10.5 15.5 14.5 9 8 9 8 8.5 7.5 5.5 4.5 5.5 4.5 12 11 11.5 10.5 63 12.5 11.5 16.5 15.5 10 9 10 9 9.5 8.5 6.5 5.5 6.5 5.5 13 12 12.5 11.5 80 17.5 14 21.5 18 15 11.5 15 11.5 14.5 11 11.5 8 11.5 8 18 14.5 17.5 14 100 17.5 15 21.5 19 15 12.5 15 12.5 14.5 12 11.5 9 11.5 9 18 15.5 17.5 15 (mm) Auto switch model

Hydraulic Cylinders

CHKDB Bore size Rod end thread type Auto switch Quantity XC64 Stroke With air release valve Dimensions CHKDB--XC64 A C C B A B C Bore size (mm) 20 16.5 14.5 7 25 17 15 8 32 19.5 17 10 40 20.5 17.5 10 50 22 19.5 10 63 25.5 22 10 80 30 26.5 15 100 36 33 15 Note) Dimensions other than those highlighted above are standard. 12

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.