Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

20.0

Ground wire (1.5 m)/Accessories IZH-A-01 High-voltage measuring handle/Option IZH-C-01 Soft case/Accessories IZH-B-01 High-voltage measuring handle Ground wire Soft case Note) Be sure to use a high-voltage measuring handle in situations such as during high-voltage measurement when there is a possibility of personnel coming in contact with electricity.

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

A_HEC-OM-J017

34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set

Body Ported Type Vacuum Ejector ZH Series

ZH05DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH05DA07 07 07 One-touch One-touch One-touch 07 N01 07 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH07DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH07DA07 07

Serial Network

Allen-Bradley PLC 1747-L524, list price: $770 as of 10/01 2. Allen-Bradley I/O card 1740OB, list prices: $280 as of 10/01 3. Allen-Bradley Scanner module 1747 SN, list price: $995 as of 10/01 4. Wiring costs are estimated at $10/point and $100/node for SI system. Your costs may vary. 5.

Digital Flow Switch (Remote type monitor unit)

No.PF-OMN0012-H PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF3W3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting

SI unit for EtherCAT

Colour on the feed holes Cable colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-28No.EX-OMN0011-F (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [

SI unit for PROFINET

Colour on the feed holes Cable colour Signal Cable O.D. 4.0 to 8.0 mm Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ White TD+ WH=White or GNWH=Green/ White 2 Green/ White RD+ 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RD-34No.EX-OMO0030-E (3) Cable with communication connector Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [

Electric Actuator / Guide rod Slider

Procedure 1In the [Parameter] 01 dialogue box select the ORIG tab. And the direction of the origin is changed from 2 (CCW) to 1(CW). Procedure 2In the [Parameter] 01 dialogue box press the "Download All" radio button. Procedure 3Power supply OFF ( Power supply ON) -24- The origin offset means the value of the origin.

VQC

A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Lubricator

Bracket B Model Tool Tightening torque AL20-D AL30-D 0.75+/-0.2 N m Phillips screw driver AL40-D AL50-D 1.5+/-0.2 N m AL60-D Set screw (2 pcs.) -15- 8. Operation and Adjustment 8-1. Adjustment of Dripping Amount Oil regulating valve While supplying air, rotate the oil regulating valve to adjust the amount of oil.

Compact

Power Connector Molex lnc. part numbr 39-01-2180 (receptacle), 39-00-0039 (pins).

SYJ300-OMU0003

5 1 ()ISO VG32 2 ()ISO VG32 30 ( ) , 8 No.SYJ300-OMU0003 SYJ Series AC200V,AC220V L,MAC DC AC200V,AC220V ,, [] [] SYJ3000,5000,7000 3 SYJ300050007000SYJ300500700 3 SYJ300-P.17 SYJ500-P.19 SYJ700-P.21 D 0.1Nm [E ] (D,E) 9 No.SYJ300-OMU0003 SYJ Series 300mm Assy DCSY100-30-4AAC100VSY100-30-1AAC200VSY100-30-2AACSY100-30-3ADC SY100-30-A 2 300mm 6 600mm 10 1000mm 3.23.7mm 15

VEX-OMV0001

-2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,

EXxx-OMP0004CN

RXBFRXB0 16BH RYBFRYB0 RX1F RY1F 31 EX260-SMJ3/4 I/O (1 ) (RX) (RY) RX00 RY00 0 RY01 1 RY02 2 : : RY0E 14 RX0F RY0F 15 RX10 RY10 RX1F RY1F I/O 32 /32 0OFF 1ON -19No.EX-OMP0004CN-I 0OFF 1ON 16 32 A D SI B 0 SI ()A B B (a (b 01 ONOFF(0OFF1ON)0 a b -20No.EX-OMP0004CN-I SI SI SI PWR LED No.1 SI PWR(V) LED No.2 Yes No SI SI L ERR LED No.3 L RUN LED or SI No.4 L ERR

LX Series Compact Electric Actuators

Power Connector Molex lnc. part numbr 39-01-2180 (receptacle), 39-00-0039 (pins).

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

VFA3000

Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. 3.2-13 VFA3000 Dimensions/Body Ported 2 position single: VFA3122-F 01 02 SlA VlA SlA VlA VM/VR VH 2 position single: VFA3130-01 02 3.2-14 VFA3000 Dimensions/Body Ported 2 position double: VFA3230-01 02 3 position closed center/exhaust center/pressure center: VFA3 30-X1 01 02 3 4 5 3.2-15 VFA3000 Dimensions/Base