Profi-E

M oni t or t he product error. 7 byt es are occupi ed f or ext ernal di agnosi s dat a. Al l ocat e dat a bel ow t o byt e 7 as a di agnosi s. D i agnosi s( D I AG ) Byt e 7 0 0 0 0 0 0 b0 b7 I nt ernal di agnost i c error 0: N o error 1: Error O ver range error 0: N o error 1: Error N ot e : Al t hough 100% F.

REC

11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66

CE2

7 !8 !

MHL2

M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 GMY20 GMY16 GMY25 GMY32 MYB20-15-A7164 MYB16-15-A7163 RCS-8 RCS-10 P16 P12 TMY-25 TMY-32 5.1 x 3 x 1.05 4 x 1.8 x 1.1 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 7 x 4 x 1.5 7 x 4 x 1.5 C-6 C-7 MYMK-20-stroke Side seal assembly Polyurethane MYMK-16-stroke MYMK-40-stroke MYMK-25-stroke MYMK-32-stroke Note) Two

Micro Mechanical Valve Series VM1000

7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

CU

Contact protection box OUT(+) Brown [Red] Lead wire length: 0.5m 7 7 6 7 8 8 Resistor Reed switch Lead wire length: 3m 35 35 30 35 41 41 Zener diode CD-P11 OUT() Blue [Black] Contact Protection Box CD-P12 Blue [Black] D-A96(V) Contact protection box internal circuits Type D-A9 switches do not have built-in contact protection circuits.

Series PF2W Digital Flow Switch For Water

Terminal 7 Green CH4_OUT1 8 Yellow N.C.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

(See note 2.) .I" END "B Er{O "4" El|D o c c o o c o st noit I Srrlro[ 2 $rl|oir ! STA!|O|{ a @

SFOD-OMT0012

Refer to section "4.1 (1-1-2) View (V)" for how to display the Teaching window. c) How to command a Return to Origin operation. c-1) To perform a Return to Origin for each axis Select the button for the axis to be operated. c-2) To perform a Return to Origin for all axes Select the All axes Return to Origin button. d) The Return to Origin operation is completed when SETON is turned on.

VXD21/22/23

Model Power source Frequency (Hz) 50 20 (32) 11 60 17 (28) 7 50 40 18 60 35 12 50 50 21 60 45 17 AC VXD21 DC AC VXD22 DC AC VXD23 DC 5 4 7 6 9 8 Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D,

-fl Seies

, , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"

Flow Control Equipment

Speed exhaust controller Option None P The effective area is two times larger With spatter cover C Body size than that of speed controller. Hexagonal lock nut K M3 M5 1/8 1/4 3/8 1 2 3 4 5 Note) Option should be indicated in order of C and K. Only available for ASV310F,410F and 510F.

RSH

3 Spring pin Roller pin Lever pin Ring A Ring B Adjustment dial End rod Lever spring Magnet Flat washer Flat washer C retaining ring for rod C retaining ring for rod C retaining ring for rod Return spring !4 !5 !6 !7 !8 !

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification . 4 1.1 LECS series driver . 4 1.1.1 How to order . 4 1.1.2 Specification . 4 1.2 LECY series driver . 7 1.2.1 How to order . 7 1.2.2 Specification . 8 1.3 Construction . 9 2.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

AC Servo Motor Driver (MECHATROLINK-III type)

L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

M/C M/C Flow control for each branch line Applications For the control of metal wire tension For air blow For flow control of N2 gas to prevent lead frame oxidation Detection camera N2 blow prevents the distortion of camera images due to air turbulence.

Vacuum Pad: Ball Joint Type

Q Hexagon width across flats P Hexagon width across flats P M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C 5 D C K H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 Hexagon width across flats 12 M8 x 1.25 M8 x 1.25 ZP3 Hexagon width across flats 12 Hexagon width across flats 3 ZP3E 3 ZP2 Y 2.5 2 ZP2V A B A B ZP Stroke