SYJ300-OMU0003

3 58 Ass'y Assy Assy SY3000-37-80A-5 A 18 21,32SA SS5YJ3SY3000-37-80A-2 B SY3000-37-80A-7 A 916 SY3000-37-80A-4 B SY3000-37-80A-5 A 18 SY3000-37-80A-2 B 20,40, 42,43SA SS5YJ5SY3000-37-80A-7 A 912 SY3000-37-80A-4 B SY3000-37-80A-9 A 1316 SY3000-37-80A-7 B SY3000-37-80A-7 A 18 SY3000-37-80A-3 B 21,41SA SS5YJ7SY3000-37-80A-10 A 912 SY3000-37-80A-6 B SY3000-37-80A-12 A

IS3000

LED/24 VDC Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 Note) Micro load type: Not available L2 option. 864 Pneumatic Pressure Switch Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

KDM

Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str. Frunzei, Nr. 29, Sector 2, Bucharest, Romania TEL: 01-3205111 FAX: 01-3261489 SLOVAKIA SMC Priemyseln automatizci, s.r.o Nova 3, SK-83103 Bratislava TEL: 02-4445-6725 FAX: 02-4445-6028 CHINA SMC (China) Co., Ltd. 7 Wan Yuan St.

HRX-OM-W038

9.3.1 HRS040-A-20-(BJMTWZ) . 9-5 9.3.2 HRS040-W-20-(BJMTW) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS040--20-(BJMTWZ). 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS040-A-20-(BJMTWZ) . 9-7 9.5.2 HRS040-W-20-(BJMTW) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS040--20-(BJMWZ) . 9-8 9.6.2 HRS040--20-T,-MT . 9-8 HRS Series HRX-OM-W038 Contents 9.7 Required facility water flow (For water-cooled type) . 9-

HRX-OM-X027

Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 HRS-R Series HRX-OM-X027 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months

FILTER REGULATOR

How to order Accessories NIL: None Port size Note B: With Bracket (130184) G: With Pressure gauge 02 : Rc1/4 IW212:G51-2-02 IW213:G51-4-02 IW215:G51-7-02 NoteOnly one size Setting pressure 2: 0.02~0.2MPa 3: 0.02~0.3MPa 5: 0.02~0.5MPa -6- 4.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

(full span), GAUGE, AIRLINE EQUIPMENT, AR REGULATOR, 22, AR NO SIZE RATKIT/ACCESSORY, .38688 lb, ModelPressure range (1)Indication unitConnection threadNote MPaG46-7-01/020 to 0.7MPaR 1 8, 1 4?

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 10 R E C L 25 150 M9BW C Number of auto switches Mounting Nil S n B L F G 2 pcs. 1 pc. n pcs.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

I

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l

3M/SMseries

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12

ALF400 to 900, ALT-5/-9

VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L

ALF400 to 900, ALT-5/-9

flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tubing O.D.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Regulator

Specifications 7 1. Application 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8. Dimensions 13 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ZB-OM00301

DC+COM A(-) C(+) COM B(-) 1N.C.ON 2 ZNR/ 3AB 23 - No.ZB-OM00301 (10ms ) 1 210ms 2 330m/s 4() A-C ON B-C ON N.C. A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

NVEPA|VEFseies

5 1 l 3 = % =V2 0 1 0 3 NVEP 31 4 Size I Pressure Size Code PSIG (Kg7cm2) NPTF (Base mount type) 2 1 7-90 (0.s-5.5)O2=t/c 03=% 2 15-135 (1-9) 4 1 o.7 -22.5 (0.051.s) 03=% O4=th 06 =Vr Subplates (NVEF2120; NVEFII20; NVERI I20) Part No.