Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Size: 43, Transparent cover material: Glass, Special Configurations: Wetted parts stainless steel, Unit Specifications: MPa

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Size: 43, Transparent cover material: Glass, Special Configurations: Oil-free (wetted parts degrease washing), Unit Specifications: MPa

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/4, Size: 43, Transparent cover material: Glass, Special Configurations: Nickel plating, Unit Specifications: MPa

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/4, Size: 43, Transparent cover material: Glass, Special Configurations: Wetted parts stainless steel, Unit Specifications: MPa

Display Pressure: 1.0MPa, Connection Thread: R 1/4, Option: Oil-free, Wetted Parts Degrease Washing

Display Pressure: 0.4MPa, Connection Thread: R 1/4, Option: Wetted Parts Stainless Steel

5 Port Solenoid Valve

VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port 1/2" 3(R) port VFS 2 x M12 M5 x 0.8 Ground screw 4 x M8 VFR 117 B B 2 B 2 B 2 B 2 2 B B 2 2 0 0 BUS 19 3 1 69 55.5 53.7 1 60 12 X 51 1 2 VQ7 PWR 3 A 4 A 4 A 4 A 4 A 4 A 4 A 4 22 17 15.5 34 2 x M12 M3 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Note) The dimensions

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 Cylinder series 16 BQ-1 20 BQ-1 25 BQ-1 32 BQ-2 40 BQ-2 50 BQ-2 63 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 CDQ2 (Except Z), CDQP2B CDQ2 (Large bore size: Except Z) CDQ2X, CDQ2Y CDLQ, CDQM RDQ RDLQ, RZQ RSDQ MK (Except Z), MK2 CE1 CXT MDU (Except Z) MDLU BQ-2 BQ-2 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 BQ-1 BQ-1 BQ

Plug-in/Plug Lead: Single Unit

CD2 CU1 CU2 K N SB SD SU W (2) 5 VQ5000 (2) (2) Kit type (2) Manifold (4) 1 Plug-in Unit (3) Direct exhaust with silencer box: Exhaust from both D and U sides Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure (except F and T1 kits) (2) 1 station Station (2) 01 Note 1) When two or more symbols are specified, indicate them alphabetically

VQ5000

metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 C [dm3/(sbar)] 12 12 VQD 4/2 5/3 (A/B EA/EB) 0.14 b 0.14 0.14 2.9 Cv 2.9 2.9 12 C [dm3/(sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

One-touch Fittings Series KQ2

2 2 8 / 3 S 3 0 7 0 Y 2 Q K 7 1 5 . 9 2 5 . 9 2 5 3 8 / 1 S 1 0 9 0 Y 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 Y 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 Y 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 Y 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 Y 2 Q K 5 . 1 3 4 3 8 3 2 / 1 S 4 0 1 1 Y 2 Q K 2 2 5 . 5 3 5 . 6 3

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable

MGG

[White] Blue [Black] Black [White] Switch 1 Load Switch 1 Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2-wire with 2 switch AND connection 2-wire with 2 switch

100

2 !3 !

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

Plug-in/Plug Lead: Single Unit

b 3.4 3.4 3.4 Cv 2 position rubber seal VQ5 01 1 2 16 16 16 C [dm3/(sbar)] 0.33 0.33 0.33 4/2 5/3 (A/B EA/EB) b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Blanking plate assembly VVQ5000-10A-5 Individual EXH spacer VVQ5000-R-5Individual SUP spacer VVQ5000-P-5-03 04 03 04 EXH block plate VVQ5000-16A-2 Throttle valve spacer VVQ5000-20A-5 SUP stop valve spacer VVQ5000-37A-5

IZx-OMP0064

Ionizer . 1-2. Accessories . 1-3. Option . 2. Installation . 2-1. Installation of ionizer . 2-1-1. Selection of piping port size . 2-1-2. Distance for installation . 2-1-3. Mounting and installation of the bracket . 2-2. Installation of the external sensor. 2-3. Routing of cables . 2-4. Transition wiring of ionizer . 3. Descriptions and Functions of the Panel . 4.

ZP

Elliptic pad 2.