VQ5000

106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 Indicator light B 2 A 4 A B 5 SMC SMC SMC SMC SMC A B B B B B B 2 A 4 Manual override A B 4 A L2 L1 58.5 P = 41 B 2 A 4 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Compact Manifold Regulator

Semi-standard 4.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320

Compressed Air Preparation Filter

4 2 4 3 Compressed air [7 : 4 : 4] Line Filter AFF Mist Separator AM Compressed air [6 : 8 : 4] Line Filter AFF 2 7 3 1 4 2 Mist Separator AM Micro Mist Separator AMD Micro Mist Separator AMD Activated Carbon Filter AMK 1 7 2 1 4 1 Certified by a third party organization Contaminants ISO 12500: Filters for compressed air test methods ISO 8573: Compressed air Particles ISO 12500-3:2009 Filters

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

Compact manifold regulator ARM5 Series

. 4.

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

Mist Separator

The compressed air quality class on the inlet side is [6:8:4]. -8- 4. How to Order 30 03 B AFM D Symbol Description Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 06 3/4 Nil Without mounting option a Mounting B With bracket Option Nil Without auto drain b Float type auto drain C N.C.

Micro Mist Separator

The compressed air quality class on the inlet side is [3:7:3]. -8- 4. How to Order 30 03 B AFD D Symbol Description Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 06 3/4 Nil Without mounting option a Mounting B With bracket Option Nil Without auto drain b Float type auto drain C N.C.

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

IZx-OMP0064

Routing of cables . 2-4. Transition wiring of ionizer . 3. Descriptions and Functions of the Panel . 4. Wiring of Cables . 4-1. Grounding of F.G. cable . 4-2. Grounding during operation in DC mode . 4-3. Circuit ("POWER" connector) . 4-3-1. Wiring of IZS40 . 4-3-2. Wiring of IZS41 and IZS42 . 4-4. Timingchart . 4-4-1.IZS40 . 4-4-2. IZS41, IZS42 . 5. Function . 5-1.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

S Couplers Series KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

SI Unit for Vacuum Manifold

: PCA-140180 4 Cable length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

MGG

4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Plug-in/Plug Lead: Single Unit

(B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (

Vacuum Unit Ejector / Vacuum Pump System

Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -18No.

EXxx-OMS0026CN

07 Byte1 byte1 07 Byte2 byte2 815 SEN3(1) Byte3 byte3 1623 Byte4 2431 Byte5 Padding 4 byte 6 byte -59No.EX-OMS0026CN <2> 0 1 2 3 4 5 AXA DYB DYB DXB DXD SEN3 SI 4 byte 1 byte 2 byte 1 byte 1 byte 4 byte (0)(EX600-AXA)4 byte (3)(EX600-DYB)1 byte (4)(EX600-DYD): 2 byte (1)(EX600-DYB)1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0

Vacuum Unit Ejector / Vacuum Pump System

Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.