Flow characteristics Note 1) Port size 12 [32 Note 2)] Flow characteristics Manifold 23 [21 Note 2)] 1, 2, 3 port Cv Cv C[dm3/(sbar)] 0.032 0.070 0.050 0.085 C[dm3/(sbar)] 0.050 0.085 0.032 0.070 b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 10-V114 10-V114A 10-V124 10-V124A 0.007 0.016 0.012 0.020 0.012 0.020 0.007 0.016 10-VV100-S41 type M5 x 0.8 Note 1) Values when manifold base (5 stations
: OFF 1 2 DC24V Power supply 18 24COM 14 Contact output 6 common 3 4 24COM +15V 11 100 + Analog output 1 : CH2 Circulating fluid discharge temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Circulating fluid electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig.2-1 Circuit diagram 2.2 Communication specification HRL Series 2-4 HRX-OM-W069
IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1-(1 : ) JIS B 8433*2) : : : 1. 2. 3. 1. 2. 3. 4. -2No.EX-OMQ0015CN / 1 1.5 3 3) 1 1 -3No.EX-OMQ0015CN () () () () -4No.EX-OMQ0015CN / () * UL UL1310 Class2 0V -5No.EX-OMQ0015CN * IP67 / *()
M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416
4 0 N 2 B S X80 2 0 3 0 ITV 33 DeviceNet compatible Model 2000 type 3000 type 2 3 Thread type Pressure range Rc(PT) NPT NPTF G(PF) Nil N T F Cable connector type 0.005 to 0.1MPa 0.005 to 0.5MPa 0.005 to 0.9MPa 1 3 5 Without Straight type 3m Nil S Option (bracket) Port size Without bracket Flat bracket L-bracket Nil B C 1/4 3/8 2 3 Specifications ITV2050 ITV3050 ITV2030 ITV3030 ITV2010 ITV3010
(PT-NPTconversion fitting is included) Fig. 2-1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.
P3318113-2 P3318105 P3318105-1 P3318105-2 Note 2) 20 Dust cover Note 2) Note 2) Note 1) No. 16 to 19 is supplied in one unit for KT-packing set.
2 Component Parts Description No. Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !
0 25 50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)
9 Seal kit NBR MHK12-PS MHK16-PS MHK20-PS MHK25-PS CR(2) P3318113 P3318113-1 P3318113-2 P3318205 P3318205-1 P3318205-2 P3318213 P3318213-1 P3318213-2 P3318305 P3318305-1 P3318305-2 P3318313 P3318313-1 P3318313-2 P3318405 P3318405-1 P3318405-2 P3318413 P3318413-1 P3318413-2 P3318105 P3318105-1 P3318105-2 FKM(2) @0 Dust cover Si(2) Note 1) No. !6 to !
Model AME250 AME350 AME450 AME550 AME650 AME850 AME150 12000 (1) 12000 Rated flow (l/min (ANR)) 500 1000 2000 3500 6000 200 Port size (Nominal size B) 1 8 1 4 3 8 , , , , , , , , , , 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 1 1 3 4 1 1, 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.
Rubber bumper and air cushion standardized (mounting dimensions are the same) Non-locking and locking type manual overrides standardized Auto switch capable 1 Series CBG1 How to Order 100 N H N L 25 CBG1 N B53 N 25 H L 100 CDBG1 With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc. "n" pcs.
Note 2) The dimensions are the same as the standard type. B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves. Standard switch grooves 12-6-17
Note 2) The dimensions are the same as the standard type. B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves. Standard switch grooves 12-6-17
Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket
14 Valve O-ring NBR 1 O-ring Bracket A P3 P5 7 2 O-ring NBR Bracket ass'y Bracket 136312 136412 2 1 set 2 Bracket B Hexagon socket head cap screw 28 X 25 X 1.5 35 X 31 X 2 8 15 O-ring NBR How to Order (1) When adding n stations to ARM : Regulator n pcs.
Rack & Pinion Type Rotary Table Size: 1, 2, 3, 7, 10, 20, 30, 50 Series MSQ 1122How to Order Size: 1, 2, 3, 7 11 Vacuum suction type Clean series A High precision type B Basic type 1 Size Nil E Side ported Front ported 2 3 7 11 MSQ B 1 A M9B Number of auto switches A With adjustment bolt Nil S n 2 pcs. 1 pc. n pcs.
IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)
C D E F G H J K L M N P Q R S T U V W Y Z 473 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264
Flange JIS B 2 3 inch Mounting orientation is upward. To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no.