Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

In-line Air Filter

ZFC1 ZFC3 ZFC5 ZFC7 1 2 V 2 3.2 V V 3 4 V V 4 6 V V 5 8 V 6 10 V 7 12 V Option Nil None B With bracket Inch size A 1/8" V V B 5/32" V V D 1/4" V V E 5/16" V F 3/8" V Max. Operating Pressure and Operating Temperature Specifications Model ZFC1l ZFC3l ZFC5l ZFC7l Max. operating pressure [MPa] 1.0 Port size (Applicable tubing O.D.)

MHY2/MHW2

Switch return position (OFF) D-F9N D-F9B D-F9BA D-F9NW D-F9NV D-F9BV D-F9NWV MHS O MHY2-10D 3 8 13 6 1 1 8 S Hysteresis O MHY2-16D 3 8 13 7 1 1 8 S MHC2 Switch operating position (ON) O Hysteresis MHY2-20D 5 10 4 5 S Switch operating position (ON) MHT2 O Switch return position (OFF) MHY2-25D 3 9 3 3 S MHY2 D-F9NW(V) D-F9BA MHW2 D-F9N(V) D-F9B(V) Red light at ON Red light at ON Green

Fieldbus system EtherNet/IP compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Technical Data 1219 MY1H Series Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AV Auto switch model D-A9 D-A9V A A Bore size A A 25 32 40 81 85 112.5 116.5 133.5 137.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Low Profile Slide Table Series MXF

Body tapped Model DReed auto switch D-A9, D-A9V 10 20 30 50 75 100 -X MXF8 8 Solid state auto switch D-M9, D-M9V MXF12 12 Individual -X 2-color indication solid state auto switch D-M9W, D-M9WV MXF16 16 MXF20 20 133 Series MXF Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Cylinder: MXF20-50 Cushion: Rubber bumper Workpiece table mounting Mounting

Air Slide Table

GR-S-010 (10 g) GR-S-020 (20 g) Guide unit GR-L-005 (5 g) GR-L-010 (10 g) Cylinder unit High carbon chrome bearing steel Stainless steel NBR NBR NBR 25 Series MXQR Auto Switch Proper Mounting Position (Detection at Stroke End) Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E A Model 10 20 30 125 75 100 40 50 150 10 20 30 125 75 100 40 50 150 MXQR6 17.5

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24

V

97L Reed 24VDC or less Max 50mA None D-90L 3 Wire Solid State NPN 28VDC or less Max 150mA 5~28VDC 1.5V Max ON: Red LED D-S992L D-S991L 2 Wire Solid State 10~28 VDC 5~150mA 4V Max ON: Red LED D-T992L D-T991L Reed 24VDC; 100VAC 5~40mA; 5~20mA Max2.4V ON: Red LED NCRB1BW20 D-R732L D-R731L Reed 24VDC/AC or less; 100VDC/AC Max 50mA; Max 20mA 5~28VDC None NCRB1BW30 D-R802L D-R801L 3 Wire Solid

CG5-S

d Dd9 D C t m t l m L H1 B1 Metric (mm) (mm) Part no.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

Actuator Position Sensor

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

180° Angular Style Air Gripper Series MHY2/MHW2

When auto switch D-M9V is used Refer to the page 766 for the details on Auto Switches Connection and Example. Max. Protrusion of Auto Switch from Edge of Body (L) (mm) Protrusion In-line Perpendicular Auto switch model Air gripper model Auto Switch Hysteresis D-M9 D-M9W D-M9V D-M9WV Auto switches have hysteresis similar to micro switches.

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NUZ322GOHOO-lt5 DIN connctor (D)/ NIf4|220-ODOO5 ftft E g !

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

Serial Transmission System Series EX250 Series EX500

PWR COM D D D D D D 3 2 1 Station D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Note) Available with manifold block for station addition. Refer to pages 77 and 81 of SV catalog (ES11-81A).

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NUZ322GOHOO-lt5 DIN connctor (D)/ NIf4|220-ODOO5 ftft E g !

Refrigerated Thermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub9 (Male receptacle) P2: Serial RS-485 D-sub9 (Female receptacle) P1: Contact input/output D-sub25 (Female receptacle) Power cable entry E S O L C SMC N E P O Rear side 93 Series HRZ Operation Panel Display Description No.

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.