Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

D side U side (1) (2) (3) (5) (4) (6) No. Mode name Model number Function 1 End plate EX600-ED2 Connected at EX600 Manifolds D side, incorporating the power supply connection. 2 Digital input unit EX600-DX#D For connecting sensors with switch output capability.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Reuse AS-FE Nominal thread size Chamfered dimension D Min.

Multistage Ejector Series ZL112.212

Note 2) Fixed unit: kPa ZY Vacuum pressure sensor ZF None Vacuum port adaptor Rc 1/8 Vacuum pressure gauge Digital pressure switch for vacuum Nil GN G D With digital vacuum pressure switch ZP Output specifications (Applicable only when the vacuum pressure sensor specification is D for digital pressure switch for vacuum) SP N P A B C D E F NPN open collector 1 output PNP open collector 1 output

Interface Regulator for VQ4000 5 Port Solenoid Valve

1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

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Flow Rate Characteristics Relief Characteristics IR3220-04-A Supply pressure: 0.7 MPa IR3220-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

Mechanically Jointed Rodless Cylinder Series MY1

1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

90

Flow Rate Characteristics Relief Characteristics IR3020-04-A Supply pressure: 0.7 MPa IR3020-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

Lightweight and Compact

In locations at altitude of 3000 m or higher (Except during storage and transportation) * For altitude of 1000 m or higher Because of lower air density, the heat radiation efficiencies of the devices in the product will be lower in the location at altitude of 1000 m or higher.

HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

Digital Flow Switch (Remote type monitor unit)

(no condensation) Environment Withstand voltage 1000 VAC, 1 min. between terminals and case Insulation resistance 50 M min.

LEC-T1_C

107 - 3 ON/OFF OFF OFF ON ON ON OFF OFF ON ON OFF OFF ON OFF OFF OFF PLC 108 - 7. / A 50mm ( ) 5m 5m 10% 15m 20% 109 - 8. / 8.1 () EMG / 110 - 1000 1 / UL,UL1310Class2 8.2 111 - 8.3 DC24VSVON a) b) c) d) e) D 100 112 - 8.4 1. 2. 3. 4. 5. 6. 7. 8. -106090% -106090 113 - 8.5 5 P5 8.6 SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS] DC24V [BK RLS] EMG /LEC 114 - 9. 9.1 / 9.2 ON

Multi-channel Digital Sensor Monitor

(Example: When the value can be displayed down to 0.001 MPa for the product for 0 to 1 Mpa, the resolution is 1/1000) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

D-A9, M9, M9W, M9AL are shipped together, (but not assembled). (Switch mounting bracket is only assembled at the time of shipment.)

3 Port Solenoid Valve Rubber Seal Series SY100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

DOC1020530

/decel. time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S)} 8 (mm) 1000 3000 (mm/s2) = 133 (ms) -26- 5.3.4 Move distance Configuration and Operation < Move distance Configuration> Set the

Dedicated Controller Series LC1 Uniaxial Type

CN1: Control terminal Model LC1-1-1000 User connector (CN1: Control terminal) Model LC1-1-1050 Dedicated communication cable (Halfpitch) (for NEC PC-98 Series) Model LC1-1-RH Cable length 02 2m 04 4m 03 3m 05 5m 0.5m Cable is connected to LC1-1-1000. 10326-52A0-008 Halfpitch hood (26P) Made by 3M PC Controller 10126-3000VE Halfpitch plug (26P) Made by 3M Cable length: 2 to 5m CN2: General-purpose