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Air Cylinder/Double Rod Construction Series CS2W 125, 140, 160 Replacement Procedure is P.287 Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !7 !4 !5 !8 !6 !

LXP ELECTRIC ACTUATOR WITH GUIDES Low Profile Electric Actuator With Guides; 2 Phase / 5 Phase Stepping Motor; Stroke Length Options: 50, 75, 100, 125, 150, 175, 200mm. LXS ELECTRIC SLIDE TABLE WITH HIGH RIGIDITY GUIDES Electric Slide Table with High Rigidity Guides; 2 Phase / 5 Phase Stepping Motor; Stroke Length Options: 50, 75, 100, 125, 150mm.

1]OUT1[F 2]OUT2// -26No.PS-OMU0005CN-C <> () ,() 13[SEt] [SEt]()[P_1][n_1]() () ()( 62) ( )(62 ) 2 (2OUT2) 1 2 2 3(32)OFF ([SEt]) 4OUT2OUT2[P_2][n_2] -27No.PS-OMU0005CN-C 27 P1L()P1H()WH1() dt1() (n1L n1H) 34 OUT2 -28No.PS-OMU0005CN-C , 35[F 0] [F] 2 3 5 F0 F1 F99 ()[-] [F 0] 31 ""M ISE20B MPa ZSE20B(F) kPa P ISE20B psi ZSE20B(F) [F 1] OUT1 32 OFF ONOFF ISE20B 0.500 MPa ZSE20B

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

Auto shift function (P. 16-3-17) Allows stable switch output even when supply pressure changes.

C O NTE NTS 3-Color Display Electromagnetic Digital Flow Switch LFE Series How to Order p. 3 Specifications (Integrated Display Type) p. 4 Specifications (Remote Type Sensor Unit) p. 5 Flow Rate Characteristics (Pressure Loss) p. 6 Internal Circuits and Wiring Examples p. 7 Parts Description p. 8 Fluid Passage Structure p. 8 Dimensions p. 9 3-Color Display Digital Flow Monitor LFE0 Series

Number of fingers and therefore, mg F 2 x With "a" as the safety margin, F is determined as follows: mg F = x a 2 x When = 0.2 When = 0.1 mg F = x 4 2 x 0.2 mg F = x 4 2 x 0.1 = 10 x mg = 20 x mg 10 x work piece weight 20 x work piece weight (Note) Even in cases where the coefficient of friction is greater than = 0.2, for safety reasons, P/A recommends selecting a gripping force which

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal

P Signals and terminal status can be monitored. P Parameters can be set.

MSU CRJ L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M CRA1 L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRQ2 L2 = L2 = Q2 = M Q2 = M MSQ Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 MSZ (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

[F 1] OUT1 23 - [F 2] OUT2 OUT2 ONOFF OUT2 OUT2ON (P_1 H_3OFF)OFF ON(P_1 H_2ON), ON ONOFF H_2H_4 (H_1 H_2 + H_4 ) P_1-70.0 kPaH_1:10.0 kPaH_2:5.0 kPaH_3:0.0 kPaH_4:1.0 kPa OUT2 () OUT1 (V) H_2 24 - <> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L

type F Seal material of the liquid contact parts is changed to SF7000 (Perfluoropolyether rubber).

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P Rc 1/8 (NPT 1/8) Sensor (breathing) port LQ1 integral fitting 1/8 (3), (4) Rc 1/8 (NPT 1/8) Pilot port Pilot port F K A B A B SMC SMC J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

The voltage (across P-N or P+-N-) of the main circuit converter is displayed. 0 to 900 V -74- 6. CC-Link setting CC-Link function of the driver. Wiring and PLC setting must to satisfy the specifications.