F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Free Mount Cylinder

D-A9V D-M9V D-F9WV A 22 (20) 5 (7) W B ( ): Denotes the values of D-M9V, D-F9WV.

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

ISO Standard Hydraulic Cylinder

D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54

T

(mm) Model Clean series M B Black 8 10 5 6.5 12 8 2.5 6 4 4 Tubing I.D.

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

3

flow ratio to be b = 0.3.

MQQ

A B C D E F Part no.

MQQ

B Applicable bore size (mm) Applicable bore size (mm) C d H Part no.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

5 Port Solenoid Valve Series SQ1000/2000

4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5

MXS Series Air Slide Table

7 2 38 12 6.6 11 12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Note) Refer to "Dimensions" of MXS25 on P. 64 for one with shock absorber as symmetric.

Pneumatic Transfer System Series MF

G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

CNS

B 1181 Class 2 M14 x 1.5 22 DJIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 160 -X 20Adjustment 1) [Horizontal] Caution Forward Data W SOL.A SOL.B SOL.C Action 1.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

MY1

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70