48 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-78 CAT.NAS100-101 Front matter 2 Electric Actuators RotaryTable Step Motor (Servo/24 VDC) Miniature Step Motor (Servo/24 VDC) Rod type Slide table type Basic type High precision type Series LEPY Series LEPS Series LER Series LERH Stroke
Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.
Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness
(2.8C) (17 m 3/h) (25 m 3/h) (43 m 3/h) (70 m 3/h) (100 m 3/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM 80 SCFM 45 F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz
200 (Example) Clamp F: Pressing force (N) l Static torque calculation Ts = F x l (Nm) Shaft center Note) Effective torque values are representative values and not to be considered as guaranteed values.
16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.
In order to actuate multiple cylinders at once, use a pressure regulator that can handle a large air flow volume and also consider installing a surge tank. 20Data 10-12-47 Stroke Reading Cylinder with Brake Series CE2 40, 50, 63, 80, 100 How to Order CE2 40 100 B Y7BW Mounting style Number of auto switches B L F G C D T Basic style Foot style Rod side flange style Head side flange style Single
In order to actuate multiple cylinders at once, use a pressure regulator that can handle a large air flow volume and also consider installing a surge tank. 20Data 10-12-47 5 Stroke Reading Cylinder with Brake Series CE2 40, 50, 63, 80, 100 How to Order CE2 40 100 B Y7BW Mounting style Number of auto switches B L F G C D T Basic style Foot style Rod side flange style Head side flange style
VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.
2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting
Weight (g) LOW type H 100 30 30 100 24 54 T 50 50 29 70 66 66 W L1 L2 127 (159) 132.5 (160) 147.5 (182.5) 253 (295) 118.5 (216) 183 (215) 258.5 (286) 204.5 (239.5) 234.5 (269.5) 1110 (1350) 740 (950) 900 (1140) 910 (1120) 1670 (2190) 1840 (2350) Values in ( ) for specification with lock 1 Pin Clamp Cylinders Series C(L)KQG32/C(L)KU32 New New New New !
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 8 for details of the mounting nut.
The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 0 and 100.
For DC 5 6 V S R 24V DC 12V DC 6V DC 5V DC 3V DC Bracket : Without bracket F: With bracket For AC (50/60Hz) 3 port 1 2 3 4 100V AC 200V AC 110V AC [115V AC] 220V AC [230V AC] Actuation bracket Normally closed Normally open 1 2 (For manifold type 20, 20R) Bracket is supplied not mounted.
E: Push-turn locking manual type F: Slide locking type i Rated voltage Only rubber seal type is available for the 4-position dual 3-port valve. 5 24 VDC !
48.2 50.0 factor 1.00 1.02 1.05 1.07 1.10 1.12 1.15 1.18 * The DewPoint refers to an ambient temperature of +100F with inlet air at 100 psig and +100 F.