NVEPA|VEFseies

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

MXW Non-rotating accuracy Rc 1/8 M5 x 0.8 Rc 1/8 M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

MIW/MIS

Increase by scraper (g) Model Model Stroke (mm) Mass (g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 650 10 30 20 MIW20-20D MIW 32 mm 1550 20 30 25 MIW25-25D For MIW, same stroke as bore size 2650 35 100 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 2 3 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10

Step Motor Controller (Servo / 24 VDC)

Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

IDX-OM-W019

Thread symbol SYMBOL DRAIN TUBE SIZE UNIT : inch (mm) NONE 10mm N 3/8 A B E D Q SWITCH WITH LAMP AIR INLET SEE TABLE 1 EVAPORATION THERMOMETER AIR OUTLET SEE TABLE 1 F G VENTILATION VENTILATION C DRAIN TUBE SEE TABLE1 TERMINAL BLOCK J 31.5[800] N M 4-0.5 [4-13] H POWER CABLE EITH PLUG (L=2800) 6-3 Dimensions IDFB Series 6 2 IDX-OM-W019 Air Dryer 6 References IDFB15E-11 Table1.

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

IDX-OM-W034

SIZE PORT SIZE B G H D E WITH LAMP SWITCH DRAFT AIR OUTLET THERMOMETER EVAPORATION BALL VALVE BLOCK TERMINAL AUTO DRAIN F C VENTILATION VENTILATION [DIA.911]) (WIRE DIA.0.4 ENTRY HOLE POWER CORD DRAIN TUBE LENGTH39.4[1000] J N M K L P [4XDIA.13] 4XDIA.0.5 (SIZE OF RECOMMENDED BOLTM10) A B C D E F G H J K L M N P Q R Model Port Size Dimensions (inch [mm] ) 31.5 [800] 34.2 [868] IDFB55E 2 1.4

IDX-OM-W035

] (M10) Unitinch [mm] A B C D E F G H J K L M N P Q R 31.5 34.2 IDFB55E 2 1.4 [800] [868] 18.5 33.7 5.0 17.9 4.3 9.8 2 0.5 19.70.1 3.0 27.60.04 20.7 20.40.2 [470] [855] [128] [455] [110] [250] [50] [13] [5002] [75] [7001] [526] [5195] [36] 35.4 38.1 IDFB75E 2 [900] [968] IDFB Series 6-3 6-2 IDX-OM-W035 6 6-4 IDFB22E-11 IDFB22E/37E-23 R GFCI GFCI R GFCI R GFCI L N PE R TB1 PE N L 1 2

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Bore size 6 10 16 20 25 6 mm 10 mm 16 mm 20 mm 25 mm Port thread type Nil M thread Rc NPT G 6 to 16 TN TF 20, 25 Series MQM is not auto switch capable. Mounting Bracket/Accessories L: Foot Note F: Front flange G: Rear flange C: Single clevis D: Double clevis Mounting bracket B: Basic (1 pc.) (1 pc.) (2 pcs.) (1 pc.)

IZx-OMP0064

Ionizer Made to Order 40 Standard type Type IZS 40 1600 10 B IZS 42 1600 10 B Bar type Made to Order Sensor Type Symbol Sensor IZS41 IZS42 Nil Without sensor F Feedback sensor 41 Feedback sensor type 42 Dual AC type G Auto balance sensor [high accuracy type] Emitter cartridge type/ Materials * Feedback sensor cannot be used for the IZS42.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47 Programless Controller (With Stroke Study) Series LECP2 LEMB LECP2 LECP1 LECP6 LEC-G LEMC LEMH/HT Model Selection Specific Product Precautions Controller Details e r No. Display Details Description t Power supply ON/Servo ON : Green turns on.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

The G thread is unavailable. If it is required, select the R thread type (Nil) instead. Please contact SMC regarding the pressure gauge supply for psi unit specifications. Note 3) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

The G thread is unavailable. If it is required, select the R thread type (Nil) instead. Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

The G thread is unavailable. If it is required, select the R thread type (Nil) instead. Please contact SMC regarding the pressure gauge supply for psi unit specifications. Note 3) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

HRX-OM-X010

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25 deg C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25 deg C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max.200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

LES*-OMZ0039 PRODUCT NAME Electric Actuator Slide tableHigh Precision Type High performance Battery-less absolute encoder MODEL / Series / Product Number LESYH Series (,,)*G In-line motor Type Motor Parallel Type Controllers 1 Series #This manual describes the dedicated terms for LESY*G. Refer to the manual of LESY series about other details.

High performance type Step Motor Controller (Servo/24 VDC)

Locations where direct vibration or impact is applied to the product. g. Areas that are dusty, or are exposed to splashes of water and oil drops. h. Areas exposed to direct sunlight (ultraviolet ray). i. Environment at an altitude of 1000 meters or higher Heat radiation and withstand voltage will decrease.