CG1-SMV13_en

Template DKP50047-F-085D Avoid repeating sudden charges and discharges of the air tank. These may cause the temperature of the product the exceed the maximum allowable value. Danger Do not exceed any of the specifications listed on the label, in section 2 of this document or on the customer drawing. Air equipment has air leakage as standard within certain limits.

Fieldbus system (PROFIBUS DP compliant)

F: Contents revised in several places. G: Contents revised in several places. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2015 SMC Corporation All Rights Reserved No.EX-OMI0032-G

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

Soft Start-up Valve AV2000/3000/4000/5000 1

PPA AV5000 AL Large effective area (mm 2) With supply/exhaust function by manual operation AV2000/ 20 (Body size: 1/4) AV3000/ 37 (Body size: 3/8) AV4000/ 61 (Body size: 1/2) AV5000/ 113 (Body size: 3/4) AV5000/ 122 (Body size: 1) Low power consumption Connectable with modular type F.R.L. combination unit Combination with F.R.L. unit F .R.L. combination Soft start-up valve AC20 AC25 AC30

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

U D B M SJ3260-5CU-C6 (2 sets) Double solenoid (24 VDC) U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 24 stations) Special specifications SJ3160-5CU-C6 (2 sets) Single solenoid (24 VDC) Valve stations F: D-sub connector P: Flat ribbon cable (26 pins) Note Note Up to 24 solenoids possible.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS 1F-3 Series RoHS Panel mount thickness: 3.5 mm at the maximum AS-F AS-F Model TMH TMH Applicable tubing O.D.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

Action Head cover type N E F Y Rubber bumper V V V V Auto switch mounting type*1 A Rail mounting B Band mounting Cylinder stroke [mm] Refer to the next page for standard strokes. Mounting bracket*1 Made to order For details, refer to page 3.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

2/3 Port Valve for Various

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

AC Servo Motor Driver (MECHATROLINK-III type)

Station Address S1 S2 00H to 02H: Disabled 0 0 to 2 (Do not use these addresses.) 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled F 0 to F (Do not use these addresses.) (2) Settings of the DIP Switch S3 The following table shows the settings of the DIP switch (S3). Switch No.

Electric Actuator with Integrated Guide Series LTF

G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 Standard motor F H L 6 8 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Standard motor Nil G R Y 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K None E F 100W Mitsubishi Electric Corporation Switch specification Yasukawa Electric Corporation 200W

Compressed Air Preparation Filter

Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L * Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts No.

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

S Couplers Series KK/KKH/KK13

How to Order KKH 4 S M S 02 Body size With sealant (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket/Plug designation Socket S Piping port size variation Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

HRX-OM-M005

Warning Contact B OUT2 W&F An alarm is raised. OUT1 to OUT6 [Numbers following OUT1 to OUT6 refer to P1/P2 contact signal connector pin numbers.] Fault Fault alarm is raised. Fault Contact B OUT3 Warning Warning alarm is raised. Flow OK Circulating fluid reaches a flow rate required for operation. 3 Remote Contact A OUT4 Ready RDY lamp on the Main screen comes on.

IDX-OM-W013

IDU Series 6-2 Refrigerant with GWP reference 6 3 IDX-OM-W013 Air Dryer 6 References 6-3 Dimentions IDU3E / IDU4E / IDU6E Evaporation Illuminated thermometer switch Q3 B3 E D A3 P Compressed air inlet Port size Compressed air inlet Port size F G Inspection Grille [200V AC Inspection Grille specification] Terminal block C3 Ventilation direction Ventilation direction Ventilation air outlet

Ionizer Gun

Pressure Flow characteristics IZG10--01IZG10--02 Mode setting switch: Continuous blow 500 450 400 Indicator (maximum) Flow rate [L/min(ANR)] 350 300 Indicator (7) 250 Indicator (6) 200 150 Indicator (4) 100 Indicator (2) Indicator (0) 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 6.

HRX-OM-K003

HRW Series 3.3 Procedure for Installation 3-9 M a i F HRX-OM-K003 Chapter 3 Transporting and Installation 5. Loosen the cap and insert the power cable from the power cable access. 6. Connect the communication cables with P1 and P2. Cap P1 (D-sub 25P female) P2 (D-sub 9P female) P3 (D-sub 9P male) Not used.