HRX-OM-R028

Unused bit is fixed to 0. 4.10 Register Map HRSH Series 4-20 HRX-OM-R028 Chapter 4 MODBUS communication function 4.10.5 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid set temperature with the selected temperature unit (C or F) during SERIAL mode.

3 Port Solenoid Valve Series VQ100 1

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

Free Mount Cylinder Series CU

Model 60 40 30 25 20 15 10 5 50 70 80 90 100 CQ2 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D RQ 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D CQM 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D MU 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260) 250

VNC

E D C B VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 278 293.5 317.5 310.5 326 350 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

-mGm-m VX VNl VQ Dotted line: Bracket mounting style (-F) 4.3-9 Series VQ20/30 Dimensions/Series VQ30 DIN connector (Y) VQ31A1-mYmm-m Dotted line: Bracket mounting style (-F) 4.3-10 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve How to Order Manifold VV2Q 2 2 08 How to Order Manifold Assembly List valve and option part numbers under the manifold base part number.

3 Port Solenoid Valve Series VQ100

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

3 Port Solenoid Valve Series VQ100 1

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

F Analog 4 to 20 mA G External input Note 4) H External input Note 4) Note 4) Accumulated flow, peak flow Unit specifications and minimum flow can be reset by external signal input.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f. Option / Semi-standard symbol: Enter them alphanumerically.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8 8.5 102.5 160

Clean Rodless Cylinder Series CYP

g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Series LX Acceleration Time Guide

Displacement at "A" when a load is applied to "F" with the slide table retracted.

HRX-OM-M091

Unused bit is fixed to 0. 4.10.6 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid set temperature with the selected temperature unit (C or F) during SERIAL mode.

HRX-OM-Q033

on the product of the power specification '-20'. 3: These alarms do not occur on the product of the cooling method -A. 4.10 Register Map HRSH Series 4-20 HRX-OM-Q033 Chapter 4 MODBUS communication function 4.10.7 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid set temperature with the selected temperature unit (C or F)

HRX-OM-S010

These alarms do not occur on the product of the cooling method -A. 3: These alarms do not occur on HRS200 series. 4.10 Register Map HRS100/150 Series 4-20 HRX-OM-S010 Chapter 4 MODBUS communication function 4.10.7 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid set temperature with the selected temperature unit (C or F)

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Flow Direction Symbols on Body How to Order Meter-out type Meter-in type Indication symbol 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Symbol Applicable tubing O.D.

CE2

200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55