Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-10S CDQP2B20-5S -10S CDQP2B25-5S -10S CDQP2B32-5S -10S CDQP2B40-5S -10S CDQP2B50-10S -20S Model CDQP2B12-5T -10T CDQP2B16-5T -10T CDQP2B20-5T -10T CDQP2B25-5T -10T CDQP2B32-5T -10T CDQP2B40-5T -10T CDQP2B50-10T -20T 5.5 6.1 8 8 10.5 10.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting D-A7 12 to 25 32 to 100

CQ2

-10S CDQP2B16-5S -10S CDQP2B20-5S -10S CDQP2B25-5S -10S CDQP2B32-5S -10S CDQP2B40-5S -10S CDQP2B50-10S -20S Model CDQP2B12-5T -10T CDQP2B16-5T -10T CDQP2B20-5T -10T CDQP2B25-5T -10T CDQP2B32-5T -10T CDQP2B40-5T -10T CDQP2B50-10T -20T 5.5 6.1 8 8 10.5 10.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 Auto Switch Mounting position (at Stroke End) and Mounting Height D-A79W D-F7WV D-F7V D-A7 D-A80 D-A73C

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

LFE-OMZ0012

O: Acceptable X: Not acceptable (1) Operate fluids with electric conductivity of 5S/cm or more. The electric conductivity is a ratio which shows how easily the electricity flows. Note that this product can not be used for fluids with low conductivity.

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-10S CDQP2B16-5S -10S CDQP2B20-5S -10S CDQP2B25-5S -10S CDQP2B32-5S -10S CDQP2B40-5S -10S CDQP2B50-10S -20S Model CDQP2B12-5T -10T CDQP2B16-5T -10T CDQP2B20-5T -10T CDQP2B25-5T -10T CDQP2B32-5T -10T CDQP2B40-5T -10T CDQP2B50-10T -20T CU 5.5 6.1 CQS 8 8 10.5 10.5 CQM 9.5 9.5 CQ2 9 9 RQ 7.5 7.5 MU 12.5 12.5 DProper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting -X

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

High Vacuum Slit Valve

XGT31-50336C XGT311-50336A1-1A For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S

Compact Cylinder Series CQS

D 30 35 30 35 35 40 40 45 C CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S M3 x 30L x 35L M3 x 30L x 35L M5 x 35L x 40L M5 x 40L 45L 6.5 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt Mounting bolt 8.5 Single Acting, Spring Extend Cylinder model Mounting bolt size C D 30 35 30 35 35 40 40 45 CDQSB12-5T -10T CDQSB16-5T -10T CDQSB20-5T -10T

LV50-OMQ0004

. *1 Applicable fluidconductivity *1 5S/cm or more (micro Siemens/cm) Detecting method Electro static cupacity Ground*5 Negative ground Fluid temperature *2 0 to 85 oC (No condensation or freezing) Repeatability Analogue output: +/-1.5F.S.

Parallel Seal Type Slit Valve

50336A1-1A XGTP31 -50336A XGTP311-50336A1-1C XGTP31 -50336C XGTP311-50336A1-1F XGTP31 -50336F Gate ASSY XGTP300-2-1S XGTP31 -50336Bellows ASSY XGTP300-20AS O-ring(Body opening side) FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGTP31 -50336-1 O-ring(Gate) AS568-271 Kalrez R4079 XGT300-9-11S XGTP31 -50336-2 O-ring(Bonnet assembly) FKM XGT300-9-7S XGTP31 -50336AS568-177 Gate Bolt XGT300-2-5S

E-MY2B_E_A

If necessary, re-application of power supply should be done when 5s or more passes after PWR indicator lamp goes off. 16 3.Stroke learning General 3 positions 5 positions General 3-1 By push of over 3s at least, the product comes into learning mode and starts stroke learning. 3-2 Confirm 2 indicator lamps MOTOR and END are blinking.

E-MY2_E_D

If necessary, re-application of power supply should be done when 5s or more passes after PWR indicator lamp goes off. 16 3.Stroke learning General 3 positions 5 positions General 3-1 By push of over 3s at least, the product comes into learning mode and starts stroke learning. 3-2 Confirm 2 indicator lamps MOTOR and END are blinking.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

rep-modular-e

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

Modular Type Air Filters Series AF

AF800 AF900 11345-5B 11345-5S No.

NCQ2/CQ2

CDQP2B12-5T -10T CDQP2B16-5T -10T CDQP2B20-5T -10T CDQP2B25-5T -10T CDQP2B32-5T -10T CDQP2B40-5T -10T CDQP2B12-5S -10S CDQP2B16-5S -10S CDQP2B20-5S -10S CDQP2B25-5S -10S CDQP2B32-5S -10S CDQP2B40-5S -10S CDQP2B50-10S -20S 6.1 5.5 45 40 x 45L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L 8 8 40 45 10.5 9.5 9.5 45 x 45L 9 9 45 50 55 65 CQ-M5 x 45L x 50L CQ-M6 x 55L x 65L 7.5 7.5 12.5 12.5 -20T Warranty

LV50-OMQ0002

Do not use the product with a corrosive fluid or a fluid with an electric conductivity of less than 5S/cm. Do not use the product with a fluid which may corrode the fluid contact part or a fluid with a low electric conductivity, such as pure water or oil. Make sue that foreign matter is not allowed in the detection passage.

LFE-OMZ0011

O: Acceptable X: Not acceptable (1) Operate fluids with electric conductivity of 5S/cm or more. The electric conductivity is a ratio which shows how easily the electricity flows. Note that this product can not be used for fluids with low conductivity.

Air Cylinder CLA Series Fine Lock Model

110+100111 Same surface 7s+50(n-2) n=2,3,4,,.. 90+s0(n-2) 110+50 (n'2) with 1 1 0 90 100 1 1 0 D-A4 Wi$l2 Differenl sudace 35 75 80 90 Same surface 100 100 r00 100 Different 7s+30(n-2) 80+30(n,2) 90+30(n-2) Same 100+100(n 2), n=2,4,5,8... l 0 75 80 90 Different 80 90 D-B5.86 D-G5.K5 Same 35 80 90 With n Ditlerenl 35+30(n-2) n=1,2,3,4.. n=2,4,6,a.. 80+30(n-2J E2,4,6,8... 90+30(n-2) Same 5s