IZx-OMV0005

Areas where ambient humidity exceeds the operating humidity range. c. Areas where abrupt temperature changes may cause condensation. d. Areas where corrosive gas, flammable gas or other volatile flammable substances are stored. e.

REGULATOR

Set pressure Nil Relieving type d Exhaust d mechanism mechanism N Non-relieving type N Non-relieving type Semi-standard Nil Flow direction Left to right R Flow direction Right to left 6 6 6 6 e Flow direction Nil Downward Y Upward f Handle Nil Name plate, pressure gauge MPa Z Name plate psi, Pressure gauge MPa / psi Pressure unit g Please refer to the catalog when you select the model. 6

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

Air cylinder 40, 50, 63 10-/1121-/22Series CA2 How to Order Clean series 10 11 Relief type Vacuum suction type Mounting style Basic style Axial foot style Rod side flange style Head side flange style B L F G Bore size (mm) Port thread type Rc NPT G Nil TN TF 10 C D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc. "n" pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

XL-OMY0001

E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

SI unit for DeviceNet TM

Occupied bytes EX180-SDN3#/5#: Output 4 bytes, input 0 bytes EX180-SDN4#/6#: Output 2 bytes, input 0 bytes -31No.EX-OMO0004-D Dimensions Unit: mm EX180-SDN3/4/5/6 EX180-SDN3A/4A/5A/6A -32No.EX-OMO0004-D Revision history A: Revision (page 2, page 30) B: Limited warranty and Disclaimer are added. C: Contents revised in several places. D: Contents revised in several places.

PSxx-OMR0001CN

4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -21No.PS-OMR0001CN-J 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(

PSxx-OMT0001CN

4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMT0001CN-E 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

BM2-032 BM2-040 D-C7, D-C8, D-H7 D-B5, D-B6, D-G5 D-A3A, D-A44A, D-G39A, D-K39A BM2-020 BM2-025 BA2-032 BA2-040 BA2-020 BA2-025 BM3-032 BM3-040 BM3-020 BM3-025 Caution Mounting Type and Accessories 1. Be careful of the snap ring springing out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it.

IDX-OM-W017

D E F G H J K L M N P Q IDFA3E Rc3/8 226 410 473 67 125 304 33 73 31 36 154 21 330 231 15 IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 275 Rc3/4 15 485 568 355 300 270 31 42 80 230 32 15 240 80 IDFA8E IDFA11E IDFA15E1 Rc1 300 603 578 41 54 396 87 258 43 15 270 101 380 314 16 IDFA Series 6-3 6 3 IDX-OM-W017 6 6-4 IDFA3E / 4E / 6E / 8E IDFA11E C R GFGI R C R GFGI R L N PE L N PE TB TB ILS

Slide Tables MX Series

D 1.Body tapped H H l Guide block D l Max.tightening torque ftlb (Nm) Locating pin hole D x H (mm) Max.screw-in depth l (mm) Bolt used Model Use a bolt that is less 0.5mm than max.(l)screw-in depth to avoid contacting the guide with mounting bolt.

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

Ionizer

(c)When a sensor is not connected.

Membrane Air Dryer

An AMH Micro Mist Separator with Pre-filter are already installed on the M and V unit types. c. Remove water droplets from the inlet air Water droplets in the air can lower performance and cause malfunction. d. Large quantities of dust (solid foreign matter) are contained in the supply air.

FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult SMC for fluids other than those listed. 6 Series FQ1 Made to Order Consult SMC for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Do not indicate suffix N for no lead wire on the D-A3lA/A44A/G39A/K39A types. The D-G39A/K39A cannot be mounted on the bore size 20. The D-A9lV/M9lV/M9lWV types and the D-M9lA(V)L type cannot be mounted. Since there are other applicable auto switches than listed above, refer to Best Pneumatics.

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Cable Motor In-line motor type/D type Cable Table D Motor r Lead [mm] t Stroke [mm] LES8 8 4 LES16 10 5 LES25 16 8 Stroke Symbol J K 30 125 150 100 50 75 Model LES8 LES16 LES25 R/L type with lock is not available. u Body option y Motor option Nil S Without option Dustproof specification Nil B Without option With lock For R/L type (IP5X equivalent), a scraper is mounted on the rod cover