CM2

D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C D-A44A D-H7lW D-H7BAL D-H7lF D-G5NTL 1.4-49 World Wide QS\E Support...

Table of Contents

D. Applicable tube O. D.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

CXWM/CXWL

and D-A8. ( mm) Note 1) The dimensions show D-A7 and D-A8. ( mm) Ht 15 Hs 12.5 Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hv 10.5 Ht 15 Hw 23 D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C 15

Single Axis Electric Actuator Series LJ1H

Model LC7R-K1A (Refer to page 200 for details.)

MGG

Hs 11 Auto switch D-B7, B8 D-G7, K7 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-G5, K5 D-G5W D-K59W D-G5NTL D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-B5, B6 D-G5W D-K59W D-G5BAL D-G59F D-C7, C8 D-C73C D-C80C D-C7, C8 D-C73C D-C80C D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-H7

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Sub-plate, 40, 41, 42 manifold Port size Nil: Without sub-plate D: Push-turn locking slotted type Electrical entry (With gasket and screws) 24, 12 VDC, 6, 5, 3 VDC M8 connector 24, 12 VDC, 01: 1/8 with sub-plate Note) 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 100, 110, 200, 220 VAC DIN terminal Grommet L plug connector M plug connector E: Push-turn locking lever type D: With connector

The CNA2 series cylinder with lock is suitable for mid-stroke stops, emergency stops, and drop prevention. An equal holding force in extending and retracting directions make it possible to lock at either end of the stroke. High reliability and stable holding force are maintained by using a substantially lengthened brake shoe with superior wear resistance. The locking mechanism is isolated

High Vacuum Angle Valve

D-G

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand

MLGP

DB st 50 50 < st 200 200 < st 350 30 36 236 254.5 st 50 50 < st 200 200 < st 350 96.5 87 st 25 25 < st 50 50 < st 200 200 < st 350 25 30 203 231.5 236 254.5 st 25 25 < st 50 50 < st 200 200 < st 350 63.5 64 96.5 87 80 100 80 100 18.5 21 45.5 46 13 33.5 31 9-11-27 27 Series MLGP Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height For D-P5DWL

MLGP

DB st 50 50 < st 200 200 < st 350 30 36 236 254.5 st 50 50 < st 200 200 < st 350 96.5 87 st 25 25 < st 50 50 < st 200 200 < st 350 25 30 203 231.5 236 254.5 st 25 25 < st 50 50 < st 200 200 < st 350 63.5 64 96.5 87 80 100 80 100 18.5 21 45.5 46 13 33.5 31 9-11-27 27 Series MLGP Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height For D-P5DWL

Series CQ2

10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 Minimum Strokes for Auto Switch Mounting Unit: mm (in) D-Z7, Z8 D-Y5, Y6, Y7 D-Y7W, D-Y7BAL 180, 200 2 pcs.

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

CA2

D-X Auto switch 20Data Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A5/A6 D-A3/ A3C D-A44/ A44C D-G39/ G39C D-K39/ K39C D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BAL D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W

VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

CY1

Note 2) D-Z73, D-Z76, D-Z80 D-F79, D-F7P, D-J79 D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) D-F9N, D-F9P, D-F9B Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for CY1R6 to 20.