FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult SMC for fluids other than those listed. 6 Series FQ1 Made to Order Consult SMC for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

Digital Pressure Switch

: 0 to 50 C, Storage: -10 to 60 C (no condensation or freezing) Ambient humidity range Operation, Storage: 35 to 85%RH (no condensation) Withstand voltage 1000 VAC, 1 minute between terminals and housing Insulation resistance 50 M or more at 500 VDC between terminals and housing Temperature characteristics 2%F.S. (25 C reference) Oil resistant vinyl cabtyre cable 3 cores 3.5, 2 m 4 cores

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

240

Up to 500 100 1 50 0 MXJ Load eccentricity L1 (mm) Selection graph z 200 2 c MXP L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also be a diagonal direction. (Refer to the drawing at right.)

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Pressure Relief 3 Port Valve With Locking Holes

3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS20 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS30 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS40 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS40-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS50 11 27.5 49.5 90 152.3 71 60 108 70 3.2 4 22 1

PSxx-OMU0005CN

-2No.PS-OMU0005CN-C / *3) 1 1.5 3) 1 1 -3No.PS-OMU0005CN-C () () () () -4No.PS-OMU0005CN-C () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (1 20 ) -5No.PS-OMU0005CN-C * FG (35 N () ,() *() 6 33 () () 30m DC(-)() () * -6No.PS-OMU0005CN-C ( ) () CE -5~50(5 ) * , 1015 10 1% 2365 LCD * -7No.PS-OMU0005CN-C 3 ISE20B -0.100~1.000MPa ZSE20B 0.0~-101.0kPa Y ZSE20BF -100.0~100.0kPa

3

Head flange FD (4 locations) FY (4 locations) (Special cap bolt) FX FZ Model (mm) Head Flange C FD FT 34 40 50 60 FV 48 54 67 80 FX 56 62 76 92 FY M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 FZ 65 72 89 108 MKG32-Z MKG40-Z MKG50-Z MKG63-Z 5.5 5.5 6.6 9 8 8 9 9 FT C FV Rod flange The dimensions other than MM dimensions are the same as those of head flange.

Multistage Ejector Series ZL112.212

SYJ514--S With valve 16 Release valve (N.C.) 1072 Multistage Ejector Series ZL112 Dimensions: Series ZL112 (Without valve) 2 x 5.4 Mounting hole 50 117 Label Exhaust port P Standard ZL112 20 V 4.5 166 ZA 56 Exhaust port Rc 1/2 35 ZX (1/2-14 NPTF, G 1/2 1/2-14 NPT) ZR P Port exhaust ZL112P V ZM ZMA 14 2 x 5.4 Mounting hole ZQ Exhaust port Vacuum pressure gauge ZH P With vacuum pressure gauge

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

MHL2

MHW2 19 MRHQ 8 25 43 Auto switch 9 Closed E 9 13 13 Open F A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Notes) J dimension is at fully closed position.

CEx-OMG0106

Connect head cover tubing wisely with consideration of surrounding conditions. 15 Driving Direction Left Right Brake O per ating P ort Brake Release P ort Head Cover-WL Head Cover-WR Tube Part No. 1 2 3 4 5 6 Head Cover Type Head Cover-WL Head Cover-WR Tubing Side Front Side Bottom Front Side Bottom Driving Left A C E G I K Direction Right B D F H J L Note

E-MY2_E_D

C Acutuator Operating temperature range Controller (separated type) 5 to 40 C Operating humidity range 35 to 85%RH (with no condensation) Storage temperature range -10 to 60 C (with no condensation and freezing) Storage humidity range 35 to 85%RH (no condensation) Withstand voltage Between all of external terminals and the case: 500 VAC for 1 minute Between external terminal and case: 50

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133

3 Port Solenoid Valve

01 02 SS073A Stations C L2 0.1 W with power saving circuit L1 1.8 18 5 23.5 21 P = 7.2 11 22 3.5 3.5 8 R1.7 7 25.5 3.4 28.5 3.5 150 (lead wire AWG#26) 27 5 150 (lead wire AWG#26) 3.5 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side 6 barb fitting 3 (EXH) port (18) 12 7 5 5 3.5 3.2 3.5 P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 14.8, L2 = n 7.2

High-precision Digital Pressure Switch ( compatible)

The fluid and ambient temperatures should be 0 to 50 C. Operation under low temperature (5 C or less) leads to cause damage or operation failure due to frozen moist in the fluid or air. Protection against freezing is necessary. Air dryer is recommended for elimination of drain and water. Avoid sudden temperature change even within specified temperature.

Process Valve

VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Electrical entry: D or DZ only Electrical entry: D or DZ only Coil rated voltage 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 1) Manual override 5 6 Note 1) Non-locking push type Nil A Electrical entry CE-compliant G Non-locking push type

Modular Type Lubricator Series AL

fitting Applicable tubing: T0604 Standard specification Accessory specification Bracket mounting size Port size Model R 35 60 80 110 110 110 110 G 27 40 54 54 66 66 F 30 41 50 50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

IZx-OMP0064

to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 Energy saving static neutralization cartridge High speed static neutralization cartridge Energy saving static neutralization cartridge Energy saving high-efficiency cartridge