Digital Flow Switch (Integrated display type) ( compatible)

setting 50 F10 Sub screen setting 51 F30 Accumulated flow value hold setting 57 F80 Display OFF mode setting 58 F81 Setting of security code 59 F90 Setting of all functions 61 F98 Output check 62 F99 Reset to default settings 65 Other Settings 66 Maintenance 70 IO-Link Specifications 70 Outline of IO-Link functions 70 Communication specifications 70 Process data 71 IO-Link parameter setting 75

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

Air cylinder (Series compatible with secondary batteries)

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 9 Position for application of grease Table 10 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 20 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.9, ) Pay attention to the mounting direction of the seal.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification LEKFS*G Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 50 to 800 50 to 1000 150 to 1200 Horizontal 15 28 40 40 50 68 26 60 75 Work load [kg] Note2) Vertical 3 7.5 15 4 10 18 4.5 4.5 25 Up to 400 20 to 1500 12 to 750 6 to 500 24 to 1300 16 to 1000

3 Port Air Operated Valve Series SYJA300 1

F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

Pressure Relief 3 Port Valve With Locking Holes

Dimensions (1) Single action type VHS40~50 VHS30 VHS20 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 43 5.5 26 10 VHS50

VNH

Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !1 Stainless steel Parallel pin !2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

Table of Contents - Tubing

INF-19 SMC Corporation of America 10100 SMC Blvd., Noblesville, IN 46060 www.smcusa.com SMC Pneumatics (Canada) Ltd. www.pneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquires: www.smcworld.com 2011 SMC Corporation of America, All Rights Reserved.

5 Port Air Operated Valve

3/8 10.0 [8.7] 0.48 [0.46] 3.0 [2.4] 8.3 0.40 2.2 Exhaust center 3 position 354 9.2 [3.0] 0.50 [0.49] 2.6 [0.85] 6.1 0.35 1.6 Pressure center Note 1) [ ]: Normal position Note 2) Values without bracket 1500 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Construction: Body Ported 2 position single VFA1000 VFA3000, 5000 Symbol 2 position single VFA1000 t qe r q e

VZ5000

(Values at the initial period) Solenoid Specifications Option Grommet (G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D) 100, 200, 24, 48, 110, 220 Electrical entry AC 50/60 Hz DC Coil rated voltage (V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Power consumption (W

MP2 - Double detatchable head side clevis style (D)

MP2 Double detatchable head side clevis style (D) XD + Stroke A UB P + Stroke 2-EE MR MAX KK MM B CD (PIN) TH LR CB E WF LF + Stroke F Bore Size (in) MM KK A B CB CD E EE F LF+ LR MR P+ TH UB WF XD+ 500 (5") 1.000 3/4-16 1.13 1.500 1.280 .750 5.50 1/2 NPT .63 4.50 .94 .95 2.88 2.75 2.500 1.38 7.75 600 (6") 1.375 1-14 1.63 2.000 1.530 1.000 6.50 3/4 NPT .75 5.00 1.31 1.32 3.13 3.25 3.000 1.63

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

2 Fine Lock Cylinder with Guide Series MLGC 20, 25, 32, 40 How to Order MLGC B R E S 32 100 H7BW L Number of auto switches Guide cylinder (Compact style with fine lock) 2 pcs. 1 pc. n pcs.

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

0 e Lead screw type [mm] r Stroke [mm] w Motor size q Size 6 10 Symbol Motor size Applicable size Nil Basic 6, 10 L Compact 10 Symbol Screw lead LEPY6 LEPY10 K 4 5 J 8 10 Symbol Stroke 25 25 50 50 75 75 y Actuator cable type1 t Motor cable mounting direction Nil Without cable S Standard cable R Robotic cable (Flexible cable)2 Top entry Entry on the left side Nil L 1 The standard cable should

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Electric Slide Table/Compact Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LES8, 16, 25 Series LES RoHS How to Order S 1 1 R J 6N LES 8 30 q w e r t y u i o !0 !1 !2 !

IDX-OM-W026

314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI GFCI R GFCI R R L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11

IDX-OM-W029

1ANR 2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) 6-3 IDU22E75E A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E

IDX-OM-U010

Note 2: Air flow capacity converted by the compressor intake condition [32C, atmospheric pressure, and 75% relative humidity]. Note 3: Do not use this product with continuous voltage fluctuations. Note 4: These values are reference values under rated conditions and are not guaranteed. Do not use these values for the thermal set values, etc.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

New

ITVX2000 Linearity Hysteresis 1.0 3.5 Output deviation factor (% F.S.) 3.0 0.5 2.5 Set pressure (MPa) Out 2.0 0.0 1.5 Return 1.0 0.5 0.5 1.0 0.0 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.)