SMC Corporation of America
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Sl modula must be orderd separately 17 17 stations Includes 1 staHon to mount Sl unit Port size Symbol P, EA, EB A,B Porting 01T 1!sNPTF Port specifications Symbol Symbol P EA,EB specifications V. NPTF 02T V. NPTF (A,B) 1 Common Common "'2 Side Bottom Bottom porting.

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C

wire (NPN equivalent) 100 V 12 V Relay, PLC 2-wire 24 V A90V No IC circuit 5 V,12 V 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

, D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Auto switch operating range A B A B A B 54 MXY6 34 MXH 59 5 MXY8 39 MXU 67 MXY12 47 MXS Solid State Auto Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside MXQ (mm) B B Model Mounting Auto switch operating range MXF A B A B A B 50 MXY6 3 38 MXW 55 MXY8 3.5 43 MXJ 63 MXY12 3 51 MXP Lead wire entries parallel 2

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

) 22.9 [583] 13 Series HRS100/150 Thermo-chiller Standard Type Dimensions inch [mm] HRS100/150-W-20 (Water-cooled 200 V type) HRS100/150-W-40 (Water-cooled 400 V type) Anchor bolt xing position B HRS100/150-A-20 (Air-cooled 200 V type) HRS100/150-A-40 (Air-cooled 400 V type) Anchor bolt xing position A (27.0 [687]) (Thermo-chiller dimension) (37.5 [954]) (Thermo-chiller dimension) 0.16 x

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

12 V 12 V Reed auto switch Solid state auto switch Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V IC circuit Relay, PLC Grommet A93V A90V A93 A90 IC circuit 100 V 2-wire 24 V 12 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Connector Grommet Diagnostic indication (2-color indication) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (PNP) 3-wire (NPN) IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit With diagnostic output (2-color indication

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

A B A B A B A B AXT511 -3 (V) AXT511 -4 (V) 24V DC 12V DC AXT511 -1 (V) AXT511 -2 (V) 100V AC 50/60 Hz 200V AC 50/60 Hz 0.049/0.043 0.024/0.021 0.031/0.020 0.015/0.01 VQ Rated voltage (V) Inrush current (A) Holding current (A) Allowable voltage (V) 0.075 0.15 VQ4 85 to 110% of rated voltage Insulation Class B (130 oC) or equivalent VQ5 A: With 2-M4 X 46 bolts for 2 position valve, B: With

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.