Rotary Table

0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J] 1.210[J] 1.820[J] With adjustment bolt 0 to 190 Note2) With internal

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

PA3000/5000/PAX1000

PAX1000, PA3000, PA5000 Proper tightening torque Nm Connection threads 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 PB1000 Proper tightening torque Nm Connection threads 1/6 turn after tightening by hand M5 2 to 3 Rc 1/8 Since the threaded sections of the PB1000 are resin, take particular care not to tighten any more than necessary.

70pvpump

PB1000 PA Proper tightening torque (Nm) Connection threads M5 1/6 turn after tightening by hand PAX Rc 1/8 2 to 3 4. Do not drop or bump. Do not drop, bump or apply excessive impact (1000 m/s2) when handling. 5. Never mount in a place which will be used as a scaffold during piping work. Damage can be caused if subjected to an excessive load.

53

Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: C (Flat w/Ribs), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: C (Flat w/Ribs), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 25 (Flat+Flat with Ribs+Deep+Bellows), Pad Styles: C (Flat w/Ribs), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: C (Flat w/Ribs), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 16 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: C (Flat w/Ribs), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)

Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)