PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

VVX31/32/33

25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

Vacuum Saving Valve

D-DN This catalog is printed on recycled paper with concern for the global environment.

INFORMATION Step Motor Controller 5 types of communication protocols New New

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.

HRS100/150

-phase 200 VAC 3-phase 400 VAC [mm] [mm] 93 Environmental friendly R410A as refrigerant Thermo-chiller Standard Type HRS100/150 Series Circulating Fluid Temperature Controller Fan Triple controller Air-cooled condenser fan control Cooling valve Heating valve Circuit diagram Ventilation Cooling valve control Fan Facility water outlet Dryer Air-cooled condenser D

53

Inverter pump Triple inverter HRZD HRW 0.6 kW 1.8 kW Water-cooled refrigeration Air-cooled refrigeration HECR 377 [mm] 970 HEC 2.4 kW HEB Triple inverter HRSH090 HED *1 Under the conditions shown on page 128 HEA Cooling capacity 9.5 kW IDH 1080 0.1C Temperature stability (when a load is stable) Set temperature range 5C to 40C W 377 x H 1080 x D 970 mm Compact, Space-saving Low-noise design

Series 12-REA Sine rodless cylinder

1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x

Compact manifold regulator ARM5 Series

L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

CEx-OMQ0010

b. c d. 3. 4. a0~60 b25~85%RH c d e 5. f g. h i 6. j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

Large Type Vacuum Unit Series ZR

10 2 10 2 23 PS PE Note) 1 indicates the dimension when bracket A is mounted.

Magnet Gripper Unit for Collaborative Robots

Auto switch Auto Switch Specifications D-M9P (With indicator light) Auto switch model D-M9P Electrical entry direction In-line Wiring 3-wire Output PNP type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage DC28V or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA)

Ｍ agnet Gripper Unit for Collaborative Robots

Auto switch Auto Switch Specifications D-M9P(With indicator light) Auto switch model D-M9P Electrical entry direction In-line Wiring 3-wire Output PNP type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) Current leakage

EX250-SPR_eng

Side D Side U (SI unit side) Communication connector Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories M12 5-pin Plug A-code 7 5 7 5 Bit No. 1 1 1 3 No. Description Function Valve manifold 2 3 SV24 V 1 +24 V for valve : Output numbers are assigned to stations from side D to U of manifold in order.

ITV

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

3 Port Air Operated Valve

1/8 12(PA) port NO 2A VFRA 42 52 NC 12 12 VPA4 3R 1P NC SYJA (1/8) 12(PA) port 12.6 13.5 83 23 VZA 91 VTA VGA 74.5 73.5 VPA VPA 28.5 X VPA3 M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/8 1(P) port For vacuum/VPA544V-102 03 A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 47 23 1/4, 3/8 3(R) port 17.6 NO 2A 42 52 NC 12 3R 1P NC 1/8 12(PA) port 13.5 12.6 91 23 74.5 73.5 28.5 X M5

Thermo-chiller

D-G

Series H, DL, L, LL Self-align Fittings

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 10 23.5 19.6 30 DL06-01 9 25 17 10 19.6 23.5 6 DL06-02 16 19 31 14 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 14 26.5 DL10-03 17 22 57 DL10-04 27 28.5 100

AS-FG

AS-D AS-T Made to Order ASP Lubricant: Vaseline 1 X12 Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) 2 X21 ASN Ex.) AS1201FG-M5-23-X12 AQ Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASV Ex.)