Exhaust Cleaner Series AMC

88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Quick Exhaust Valve Series AQ

50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2

Miniature Regulator

56 35 32 22 M12 x 1 Panel cutout dimensions 12.5/Panel thickness: 4 or less 19 2 27 2 x 5.5 57.2 8.5 82.5 15 Applicable tubing O.D.

Speed Controller with

11 15.4 8.8 10.1 13.5 3.7 AS1002F-03A 5/32" 9.3 7.7 10 37.6 4 AS1002F-07A 1/4" 12 10.9 40.1 6.2 12.9 25.2 24.1 12.8 5.2 AS2002F-03A 5/32" 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 31.4 30 12.6 17 10.5 12.3 13.5 6.1 AS2002F-07A 1/4" 12 10.9 43.2 6.5 13.6 31.6 30.2 12.8 7.1 AS2052F-07A 1/4" 13.2 12 4.3 7.8 13 16 52.2 7.6 17.2 36.2 34.6 17 22.5 12 16.1 17 12.1 AS2052F-09A 5/16" 15.2 13.5 56

Speed Controller with Indicator

16.4 30.1 21.5 39.7 14.2 16 AS231FS1-G02-04 4 13.2 24 17.5 35.7 43.8 42.4 38.3 36.9 13.3 20 15 7.2 9.6 12 1/8 13 26 AS231FS1-G02-06 6 10.4 19 33.8 21.4 43.9 28 AS231FS1-G02-08 8 13.2 34.9 23.5 46 14.2 29 AS231FS1-G02-10 10 15.9 20.9 38.1 24.7 47.3 15.6 32 AS331FS1-G02-06 6 8.2 16.5 29.9 17.5 40.1 49.7 48.3 43.2 41.8 13.3 21.5 16.2 1/4 17 12.9 13 55 AS331FS1-G02-08 8 13.2 38 23.5 59.9 14.2 56

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

23 63 18.5 19 12.9 20.6 AS331FG-03-08 AS331FG-N02-11 28.2 49.1 56.2 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 59 16.2 69 23 21 46.5 41.5 23 R 3/8 19 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 53.5 46.1 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 16.2 12.9 20.6 23 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 46.5 41.5 40.2 35.2 34.4 55.3 49.1 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 23 59 18.5 19 AS431FG

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

59 12.8 45 17 7.4 16.5 11.4 52.2 6.2 34.9 3/16" 35 60 64.4 15.2 45.8 18 8.2 15.5 7.2 1.2 17 13.2 54.4 7.1 35.7 1/4" 33 20.6 9.8 1.2 64 71.6 18.5 47.3 21 9.8 18 15.2 59.8 8.1 36.7 5/16" 36 68 76 20.9 48.5 22 11 17 13.2 59 7.4 45.2 1/4" 56 121 77.7 18.5 55.4 21 20.6 9.8 1.2 18 5/16" 15.2 64.4 8.2 46 60 27.6 12.4 11.3 1.2 125 20.9 56.4 22 82.1 3/8" 17.9 70.8 9.5 47.2 21 72 AS4001F-11D 3/8"

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

18.5 42.5 28.3 64.7 17 34 AS33l1F-U03-06A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 1/4 19 50 48.4 43.6 42 AK 13.3 31 AS33l1F-U03-08A 8 13.2 37.1 23.5 52.2 14.2 AS33l1F-U03-10A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 32 AS33l1F-U03-12A 12 18.5 42.5 28.3 57 17 34 AS43l1F-U04-10A 10 1/2 24 15.9 17.4 18.8 25.6 46.4 26.1 61.2 50.8 49.2 42.2 40.6 15.6 54 AS43l1F-U04-12A 12 18.5 21 26.2 48.3 28.3 63.4 17 56

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

18.5 63 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 21 69 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 17 56 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 18.5 59 23 19 AS431FG-04-10

Speed Controller: Standard Type In-line Type AS Series

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

C76

101 to 150 st 151 to 200 st 151 to 200 st 7 12 7.5 12.5 1 to 50 st 8 (33) 13 (38) 32 40 32 40 138 138.5 83 88 83.5 88.5 58 63 58.5 63.5 108 113 108.5 113.5 D-C7/C80 D-C73C/C80C NCA D-J79C 8.5 (33.5) D-A73 D-A80 13.5 (38.5) DD-A72/A7H/A80H D-A73C/A80C D-F7/F7W D-J79/J79W D-F7WV D-J79C D-F7BAL, D-F79F 32 84 59 9 (34) 8 109 -X 40 139 89 64 14 (39) 13 114 2032 40 32 40 136 81 86 82 87 56

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and

Compact Cylinder

49.5 14 28 62 12 M8 x 1.25 depth 13 6 12 6.5 7 51 15 3 5 to 100 56 49.5 14 31 80 12 M8 x 1.25 depth 13 6 12 6.5 7 69 15 3 Rod End Male Thread (mm) X C1 B1 L1 H1 Size 20 25 32 40 18 15.5 13 24.5 M8 x 1.25 18 15.5 13 24.5 M8 x 1.25 26 23.5 19 32.5 M12 x 1.25 26 23.5 19 32.5 M12 x 1.25 For details about the rod end nut, refer to page 8. 6 Series CQU Compact Cylinder: Plate Type Double Acting

Rotary Actuator

For details, refer to pages 191 to 195. 80 12.5 24 44 M16 x 2 100 14.5 30 56 M20 x 2.5 205 CVRA1 Series Construction/With Solenoid Valve Without air cushion !7 !4 !3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

Possible to transfer a workpiece at low-speed.

A S 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BU H Size Rotation angle 10 15 90, 180 29 12 18 42.4 (8.5) 8.5 17 6.7 2.2 16.7 5 90, 180 31 14 20 53.6 (9.5) 9 26.4 10.6 23.1 6 DW Q S US UW ab M TA TC TD Rotation angle Size 90 56 10 4.5 17 35 44 6 9 15.5 8 15.4 180 69 90 65 15 5.5 20 40 50 7 10 16 9 17.6 180 82 The AU dimension is not the

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

Coolant Valve

Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56

3

75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5

1

XSA2-43S 64.5 31 3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread

Vacuum Unit

Ejector Specifications Suction Filter Item Model ZK2m07 ZK2m10 ZK2m12 ZK2m15 Nozzle diameter [mm] 0.7 1.0 1.2 1.5 Nominal filtration rating 30 m Port exhaust [L/min (ANR)] 34 56 74 89 Silencer exhaust/ Complex exhaust [L/min (ANR)] 29 44 61 67 Filtration area 510 mm2 Max. suction flow7 High-noise reduction silencer exhaust [L/min (ANR)] 34 56 72 83 Air consumption7 [L/min (ANR)] 24 40 58