Modular Type Lubricator Series AL Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.
M5 port) 0.06 0.09 0.12 0.22 JCMBmm-m JCMBmm-mF (Basic (Female thread on both covers), Rc1/8, NPT1/8 port) 0.09 0.12 0.16 0.29 (Basic (Female thread on both covers), Rc1/8, NPT1/8 port) 0.08 0.10 0.14 0.24 Basic weight Basic weight JCMMm-m (Male thread on both covers, M5 port) 0.08 0.12 0.15 0.28 JCMMm-mF (Male thread on both covers, M5 port) 0.07 0.10 0.13 0.24 JCMMmm-m (Male thread on both
Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m].
Back side 4-J Depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)
counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0
A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33 39.5 26 31 35 43 23.5 27 39.5 43.5 57.5 65.5 35 41 26.5 29 41.5 48 50 55 VV2CA3 VV2CA4 8 Series VCA Manifold Exploded View Series VCA20 Description No. 1 2 3 4 Part no.
7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !
resistant F9BA (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Auto switches marked with a symbol are produced upon receipt of order.
M Input block EX500-IE3 (2 sets) VOLTAGE 24VDC/650mA EX500-IB1 INPUT 16 IP CODE IP65 SERIALNo.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
type (4 cores) Cable connector 3 m (33) 52 12.5 Setting part 12 M12 x 1 Cable connection thread (Plug type) 4 10.5 11 108 Digital pressure display M5 x 0.8 Solenoid valve EXH M4 x 0.7 depth 8 F.G.
M33 x 2 1/4 108 16 5 0 183 M16 x 1.5 21 34f8 22 5 Hydraulic Cylinder: 7MPa Series CHN Axial foot type: CHNL H GA2 GB2 I Rc P Rc P Rc P K A F GA1 GB1 T V Cushion valve Effective thread H2 width across flats B2 Cushion valve Cushion valve H1 width across flats B1 MM D 4-LD W LH LT Width across flats E GB3 GA3 Air release Air release NA NB S + Stroke X X LS + Stroke Y Y LX ZZ + Stroke LZ (
ZP3P 20 JT2 SF M ZP3PG20JT2SF-M-7A-X2 21 ZP3P-20JT2SF-WM ZP3P 32 JT2 SF ZP3PG32JT2SF-7A-X2 48 ZP3P-32JT2SF-W ZP3P 32 JT2 SF M ZP3PG32JT2SF-M-7A-X2 48 ZP3P-32JT2SF-WM ZP3P 20 JT5 SF ZP3PG20JT5SF-7A-X2 23 ZP3P-20JT5SF-WG ZP3P 25 JT5 SF ZP3PG25JT5SF-7A-X2 25 ZP3P-25JT5SF-WG ZP3P 32 JT5 SF ZP3PG32JT5SF-7A-X2 54 ZP3PA-T2JT-7A-X2 ZP3P-32JT5SF-WG Input the material symbol (N, S, U, or F) into the
L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.
RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.
RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.
RZQ Symbol Specifications MI W S -X416 Holder mounting bracket I 5 m, 10 m, 15 m, 20 m Cable: 7, 6 core twisted pair shielded wire, oil, heat and frame resistant cable Extension cable (Option) CEP1 -X417 Holder mounting bracket II Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.
Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit : torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 7-1 Required screws All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). 25 No.EX##-OMY0004 7.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.
of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings
ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.