ZP

Form w 1 Material e Vacuum inlet r Connection A thread Width across flats 12 10 13 A5 59 38 22 2.5 M5 x 0.8 21 8 4 16 59.5 38.5 22.5 10 13 Width across flats 7 64 38 22 2.5 16 64.5 38.5 22.5 20 25 68 42 24 3.5 32 68.5 42.5 24.5 40 72.5 46.5 28.5 6 50 73.5 47.5 29.5 20 25 A8 M5 x 0.8 N S U F GN GS N4 N6 U4 U6 A6 M6 x 1 26 8 4 ZP Y U D2 Construction p. 117 58 42 24 3.5 M8 x 1 16 12 4 32 58.5

CNS

For details, refer to page 9-8-22.

LJ1H

8 9 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PA Scale: 10% 12.5 9.5 Work piece mounting reference plane LJ1 LG1 LC1 LX LC6D/LC6C Switches 110 4-M6 x 1 thread depth 15 67 20 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) Z section 22

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5 137 150.5 137 PE port PE port PE port PE port 65 39 EA EB P 27 65 39 EA EB 27 P 1/2, 3/4, 1 1 port 3/4-

SZ3000

22 22 SOL.A SOL.A SOL.A 21 21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

34 30 72 22 40 FT FX 40 89 22 50 (mm) L B + Stroke FZ A + Stroke Bore size (mm) Stroke range (mm) 4-FD A L 10 10 to 40 8 75 Rear flange type: MQQLG 10, 16, 20 25, 30, 40 16 10 to 60 10 88.5 2-FD 4-FD 20 10 to 60 10 97 25 10 to 50,75,100 12 104.5 30 10 to 50,75,100 12 124 FV FV 40 M 10 to 50,75,100 12 124 (Dimensions other than A and L are the same as the front flange type.)

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

Compact Cylinder with Air Cushion Series RQ

50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 9 for details on rod end nut and accessories.

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable cylinder bore size (mm) ND NX Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.

VQ7-6/7-8

Proper tightening torque Nm Tightening torque for piping Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Model: 10S6 (Side Ported), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit: WF (PROFINET, Compatible Wireless Base Unit), SI Unit Output, End Plate Type: 4 (SI Unit Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port Entry, SUP/EXH Block: E (D Side, 2 to 10 Stations, Internal Pilot, Built-in Silencer), P,E Port Size: N (ø1/2" One-touch Fitting), Mounting: D12 (

Model: 10S6 (Side Ported), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Block: E (D Side, 2 to 10 Stations, Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN

Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: C (Positive Common, M8, 4 Inputs), Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 7 Stations, Input Block Type, Common Spec: C (Positive Common, M8, 4 Inputs), Valve Stations: 10 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting),

Model: Top-Ported, Serial Interface, EX600, SI Unit: PROFINET, Compatible Wireless Base Unit, SI Unit Output, End Plate Type: SI Unit Negative Common, M12 Connector, I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port Entry, SUP/EXH Block: D Side, 2 to 10 Stations, Internal Pilot, Built-in Silencer, P,E Port Size: ø1/2" One-touch Fitting, Mounting: Longer than Standard DIN Rail

Series: JSY3000, Type: Side-Ported, Serial Interface, EX600, SI Unit: EA [EtherNet/IPâ„¢ (2 Ports)], SI Unit Common, End Plate: Power Supply w/M12 Connector, PNP, I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: Internal Pilot, Built-in Silencer; D Side, 2 to 10 Stations, A,B Port Size: ø6 One-touch Fitting, Mounting: DIN Rail Mounting, DIN Rail Option: DIN

Series: JSY3000, Type: Side-Ported, Serial Interface, EX600, SI Unit: EA [EtherNet/IPâ„¢ (2 Ports)], SI Unit Common, End Plate: Power Supply w/M12 Connector, NPN, I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: Internal Pilot, Built-in Silencer; D Side, 2 to 10 Stations, A,B Port Size: ø8 One-touch Fitting, Mounting: -, DIN Rail Option: -