Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

VQ7-6/7-8

P.7 Manifold Dimensions (DIN Connector Type) P.8 Manifold Dimensions (Prewired Connector Type) Manifold Options P.9 to 12 Manifold with Control Unit P.13, 14 Option Dimensions P.15, 16 Series VQ7-8: Single Unit How to Order Valves P.17 Models, Standard Specifications P.18 P.19 Single Unit Valve Dimensions (DIN Connector Type) P.20 Single Unit Valve Dimensions (Prewired Connector Type) P.21

ZPT/ZPX

11 Hexagon width across flats 21 11 Width across flats 37 4-M4 x 0.7 45 Width across flats 24 3-M3 x 0.5 28 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B D B D Dimensions Dimensions (mm) (mm) A B C D E G H I Y A B C

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t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

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7661 Table of Contents Section I 1-9 Valves 1-2 Understanding Circuit Symbols 3 Cv Defined 4 Pneumatic Valve Sizing 5 Valve Selection Guide 6-9 Frequently Asked Questions Section II 10-19 Cylinders 10 Size Selection 11 Piston Rod Strength 12 Pneumatic Cylinder Force 13 Air Cylinder Speed 14 Air Consumption Rates 15-19 Frequently Asked Questions Section III 20-24 Circuits 20 Basic Control 21

Compact

21 2 x 3.4 (Through holes for mounting) 47.4 (2) 15 2 x M5 x 0.8 (Pilot port) 37.8 + Stroke 39.5 + Stroke 36.3 29.7 + Stroke 4 9 2 15 30 20.7 + Stroke 17.4 30 (49.4) 4 x M3 x 0.5 depth 2.5 21 8 +0.1 9 0 depth 2.5 21 Auto switch MXZ20R(Pilot port location: Right) MXZ20L(Pilot port location: Left) 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) 20.7 + Stroke 20.7 + Stroke 9 9 (47.4) (47.4

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

Thermo-chiller

Note 9) If the product is used at altitude of 3280ft (1000 m) or higher, refer to Operating Environment/Storage Environment (page 21) Item 13 For altitude of 3280 ft (1000 m) or higher. Note 1) Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature and/or circulating fluid temperature is 50F (10C) or less.

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7661 Table of Contents Section I 1-9 Valves 1-2 Understanding Circuit Symbols 3 Cv Defined 4 Pneumatic Valve Sizing 5 Valve Selection Guide 6-9 Frequently Asked Questions Section II 10-19 Cylinders 10 Size Selection 11 Piston Rod Strength 12 Pneumatic Cylinder Force 13 Air Cylinder Speed 14 Air Consumption Rates 15-19 Frequently Asked Questions Section III 20-24 Circuits 20 Basic Control 21

Booster Regulator/Air Tank

model 1027 VBAT Series CE Marking-Conformity Products Specifications Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Fluid Tank capacity (L) Max. operating pressure (MPa) IN port size OUT port size Ambient and fluid temperature (C) Installation Weight (kg) Material Paint Compressed air 10 20 38 5 2.0 1.0 3/8 1/2 3/4 3/8 1/2 1/2 3/4 0 to 75 Horizontal (Floor mounting) 6.6 10 14 21

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ1170 N 5MO C6 L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

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LECP6 LECP1 (Programless type) PController Supplied by customer Controller power supply 24 VDC Step data input type LECP6 Programless type LECP1 Page 13 Page 24 P Power supply connection Pages 16, 30 Connection Controller type LECP6 (Step data input type) Power supply plug (accessory) Power supply cable (1.5 m) (accessory) LECP1 (Programless type) P Controller setting kit (Option) Page 21