Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

48

LECP6 LECP1 (Programless type) PController Supplied by customer Controller power supply 24 VDC Step data input type LECP6 Programless type LECP1 Page 13 Page 24 P Power supply connection Pages 16, 30 Connection Controller type LECP6 (Step data input type) Power supply plug (accessory) Power supply cable (1.5 m) (accessory) LECP1 (Programless type) P Controller setting kit (Option) Page 21

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

OUT1 OUT2 10.2 DC () DC (+) 43 1 IN OUT (34.2) 13 1 IN 3 2 x Port size 18 18 G1/4 2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-F02L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 17 43 1 (34.2) 3 1 IN 18 2 x 3.4 IN OUT 2 x Port size G1/4 Width across flats 21 68 28 8 2 x 2.5 depth 5 8 Series PFMB7 Dimensions PFMB7201S-C8 96 76 58 48 18 OUT1 OUT2 10.2 DC () DC (+) 43 1 51.5 (Max. 58.5) IN OUT (34.2) 3 13

Direct Operated

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 50 42 61 1.5, 2.2, 3 36 41 42 42 18 93 22 76.5 30 19 19.5 27 19.5 40 42.5 58.5 46.5 92 42.5 17.5 50 75.5 40 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 20.5 24 24 90 35 40 22 22 22.5 32 36 22.5 60 43 46 52.5 61.5 52 49.5 95 98 52.5 64 21 57 57 89 21 106.5 47 47 98 25 25.5 68.5 61 64 60.5 52 61 66.5 21 97 21 114.5 21 Series VVX31/32/33 For Air, Oil / Manifold

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 5) In order to release a workpiece, design the circuit for vacuum release separately. 5 6 E F Circuit diagram PV PS V V PE E F ZQ1 1U-J2 F 21 Space Saving Vacuum Pump System Series ZQ Dimensions Type Q1, N1 ZQ1000U-Q1 ZQ1000U-N1 Vacuum release flow adjusting needle 5 6 5 6 A B 0 A B 0 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Pilot pressure

Air Cylinder Series CS1

Description Material Note DAir releasing B Rolled steel Zinc chromated 19 25 Rod seal NBR Air releasing A 20 26 Piston seal Chromium molybdenum steel -X Check ball 21 Chrome bearing steel Replacement Parts (Seal kit) Tie-rod reinforcement ring Black painted Rolled steel 22 For replacement parts no. (seal kit) for air cylinder standard type Series CS1, refer to page 416.

Vacuum Gripper

Dimensions. 21 5.1. Vacuum Gripper . 21 5.2. Center of gravity . 22 5.3. Suction cup with adapter . 23 6. How to change the number of cups . 25 6.1 Change to 1 cup (with flange) . 25 6.2 Change to 1 cup (without flange) . 26 6.3 Change to 2 cups . 27 7.Maintenance . 28 7.1. Maintenance for vacuum gripper . 28 7.2.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

RWr(n+20) RWw(n+20) RWr(n+21) RWw(n+21) IO-Link IO-Link : : Process data Process data Port 1 Port 1 RWr(n+2E) RWw(n+2E) RWr(n+2F) RWw(n+2F) RWr(n+30) RWw(n+30) RWr(n+31) RWw(n+31) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+3E) RWw(n+3E) RWr(n+3F) RWw(n+3F) Unit No.1 EX600-GILB RWr(n+40) RWw(n+40) RWr(n+41) RWw(n+41) IO-Link IO-Link : : Process data Process data Port

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, please refer to page 12.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3 G49-2-l02MS-X3 Round type Note 2) 0.2 MPa G49-7-l01MS-X3 G49-7-l02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Compact Type Dual-Rod Cylinder Series CXSJ

Refer to page 21 for detailed specifications. Auto switch type Part no.

Wedge Cam Operation Gripper Series MHK2

actuation for precision/rigidity Dust cover for adverse environments Compact and Lightweight Mounts from 3 directions Auto switch capable Q Q Q Table of Contents Q Q Q Q Product Features .page 4-5 Operation Guide/Safety Instructions .page 6-9 How to Order .page 10 Specifications .page 11 Construction/Parts List .page 12 Example of Model Selection .page 13-17 Dimensions .page 18-21

Parallel Type Air Gripper Series MHZ

Kit includes items 21, 22, 23 and 24 from the table above. MHZA6-PS Seal kits consist of items 21, 22, 23 and 24 in one kit, and can be ordered using the seal kit number.

Air Cylinder CLA Series Fine Lock Model

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

Compact Electric Actuator Series LG1

Guide type Cable direction of entry H High rigidity direct acting guide Axial direction F Series 21 With coupling Note) A driver is included when shipped with a nonstandard motor installed.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

(Refer to page 21 for details.)

Air Slide Table Series MXQ

27 29.5 35.5 Model 150 56.5 64 125 42.5 55 64 100 34 42.5 53.5 50 75 28.5 34 33 37.5 43 50 18.5 28 25 30 33.5 43 40 18.5 20.5 25 27 29.5 35.5 30 14.5 18.5 21 27 29.5 35.5 10 14.5 16.5 21 27 29.5 35.5 Allowable moment coefficient: Graph 2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 6 7 9 10.5 14 16.5 13.5 16 19.5 24.5 30 37 13.5 16 19.5 24.5 30 37 6 7 9 10.5 14 16.5 1.0 Allowable moment coefficient

MXH Series Compact Slide

17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-r a Stations fUfiotlo ihl drb rsft vJ3000-21-1A End cover srde of --Frqclsaqq!

3 Position Cylinder Series RZQ

RZQ32-PS RZQ40-PS RZQ50-PS RZQ63-PS Contents Bore size (mm) 32 40 50 63 A set of Nos. 19, 20, 21, 22 and 24 from the table above Seal kits are sets consisting of items 19, 20, 21, 22 and 24 and can be ordered using the seal kit number for each cylinder bore size. 8 Series RZQ Dimensions Standard type (Double end tapped type)/RZQA 3-P (port size) FA H effective thread depth C Q FB G I D