Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

LEC-T1_C

TB 1 TB ID 1 1 CN4 2 CRC 3 func 4 ID 5 6 7 8 ID 119 - 9 FLASH 10 FLASH 11 1 CN4 11 2 3 4 120 - Ver1.** Ver2.** TB Ver.511 1TB Ver1.** TB Ver.511 11 TBsetting Language 12 TBsetting Language12 11 SET MENU TEST MONITOR DATA ALARM JOG SETTING SET AX IS. Setting 1 MENU Recconect Start Disp Easy Item Speed 1 Disp AX IS.

IDX-OM-V020

Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1

Low Profile Guide Type

Technical Data 1555 CY1F Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) D-A9, D-A9V (mm) Note 2) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range 9 B1 B2 B3 (mm) 10 15 25 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5 95.5 24.5 115.5 44.5 115.5 D-M9, D-M9V, D-M9W, D-M9WV D-M9A, D-M9AV Mounting pattern q B1

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

PF-OMN0011_C

.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] A 1-5V 1-5V 4-20mA (Hysteresis) ON OFF 90% () Ka (copy function) () 10 L/min 10 L Sa ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L ON-OFF 1 L/min ,10 11 12 1 L/min -13No.PF-OMN0011CN-C SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C

Low Maintenance Filter Series FN1

225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Rotary One-touch Fittings Series KS/KX

D1 D2 L A M M5, M6 Nylon Urethane M5 0.8 M6 1.0 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 38.5 11 13 39 35 8 10.4 2.5 4.0 4.0 16 4 1 8 M5 0.8 M6 1.0 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42 68

Digital Gap Checker

(pressure) When pressure is displayed on the sub screen, indicates the pressure unit currently selected. -14No.PS-OMT0002-E 2 About this product Specification Specifications (ISA3) Model ISA3-F ISA3-G ISA3-H Applicable fluid Dry air (Filtered through a 5 m filter) Rated distance range 0.01 to 0.03 mm 0.02 to 0.15 mm 0.05 to 0.30 mm Displayable/Settable range (Distance reference) 1 0 to 60

EX500-GPR1A.eng

SI unit for SV series valves ( EX500-S 01 ) ( EX500-Q 02 ) PWR PWR COM COM 64.4 80.3 64.4 28 66 84.8 79.4 68.5 80.3 series 54.5 60 60 43.2 43 43.2 22.2 22 22.2 13 10.5 28.6 44 0 1 36 10.5 1 0 22 23 The mounting and removing methods of SI unit are as shown below.

XL-OMY0001

XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2

XL-OMV0002

55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11

Air preparation filter

Application 11 3. Specifications 11 4. How to Order 12 5. Component name and spare parts list 13 6. Troubleshooting 14 7. Assembly and replacement procedure 7-1. Bracket assembly 15 7-2. Auto drain replacement 15 7-3. Element replacement 19 8. Dimensions 20 -2- Doc. no.

7.4

AN110-01 (BC sintered body) AN10-01 (Resin) 34 23 11 13 756 Options S0700 Series Body Ported Base Mounted Double check block (Separated) VQ1000-FPG-mm Cylinder side pressure (P2) SJ It is used on the outlet side piping to keep the cylinder in the intermediate position for long periods of time.

E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

MHx-OMY0005

No.MH*-OMY0005 // MHF2-8D MHF2-12D MHF2-16D MHF2-20D 1. . 4 2 . 5 2-1 . 5 2-2. . 5 2-3 . 6 2-4. . 10 2-5 . 11 2-6. . 11 2-7. . 11 3 . 11 3-1. . 11 3-2. 1 . 12 3-2. 2 . 13 3-3. 1. 14 3-3. 2 . 15 3-4. /1 . 16 3-4. /2 . 17 1 *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less Over 75 to 175st 75st or less Over 75 to 175st Over 175 to 275st Over 175 to 275st Over 275st Over 275st 11 7.5 Rc1/8 32 15 34 30 96 44 110 78 98 63 124 200 300 83 121 171 45 48 32 11 7.5 Rc1/8 38 18 38 30 104 44 118 86 106 72 124 200 300 84 122 172 46 48 40 14 9 Rc1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.