(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Air cushion, Operating Pressure(MPa): 0.1 to 0.7, Specification: Built-in magnet, Auto Switches: Without

Clean Series: Vacuum Suction Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 200mm, Cushion: Air Cushion, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band

Clean Series: Vacuum Suction Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting

Clean Series: Vacuum Suction Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Refrigerated Air Dryer Series IDF/IDU

Inlet air pressure(MPa) 0.15~1.0 Ambient temperature (Humidity) 2~40 (Relative humidity of 85% or less) Applicable compressor (as a guide) 11 2.2 3.7 5.5 7.5 5.5 3.7 2.2 1.5 0.75 (for screw style) (kW) Single phase, AC100/100 to 110 Single phase, AC100/100 to 110 Single phase, AC200/200 to 220 Power source (V) 50/60Hz 165 195 310 360 330 370 165 195 175 210 210 250 200 230 320 385 335 380

90

B and H cannot be selected at the same time. The current bracket cannot be used for this product. Note 2) Assembly of a bracket and set nuts. Note 3) See pressure unit table below.

Serial Transmission System Series EX250 Series EX500

For details, refer to page 14. 11 Plug-in Unit Base mounted Series VQC How to Order Valve VQC 4 1 0 5 0 Series 4 VQC4000 Manual override Type of actuation Nil: Non-locking push type (Slotted) 2 position single A B Light/Surge voltage suppressor 1 With Without light/surge voltage supressor Nil E PEB EA 2 position double (metal) A B P EA EB 2 B: Locking type (Slotted) 2 position double (rubber

Speed Controller with One-touch Fittings

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Hand Valve Series VH

4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH42l-06 (Bottom piping) VH42l-02 to 04 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-10 Series VH Body Mounted/Dimensions VH600-06/10 2 (A) 4 (B) 1 (P) l152 132 4-11 132 300 223 151 150 48 25 4-Rc3/4

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.