ZP

-6-A10 U C ZPT32 -6-A10 U C ZPT25D20-6-A10 ZPT20 -6-A10 116.5 50.5 20 23 1.7 14 23 51 4 ZPT25D30-6-A10 126.5 60.5 25 28 1.8 ZPT25D40-6-A10 162.5 70.5 77 32 35 14.5 23.5 4.5 2.3 ZPT25D50-6-A10 80.5 172.5 Dimensions by Stroke 20, 25 32 Model G E F E F U C ZPT 20-6-A10 U C ZPT 30-6-A10 U C ZPT 40-6-A10 U C ZPT 50-6-A10 U C ZPT 10-6-A10 23 34.5 72.5 35 73 110.5 45 44.5 111 51 54.5 120.5 55 121

Table of Contents

40.5 76.5 23 Flat with ribs U C ZPT25 -B5-A10 U C ZPT32 -B5-A10 U C ZPT25D20-B5-A10 ZPT20 -B5-A10 50.5 114.5 20 23 1.7 23 14 51 4 ZPT25D30-B5-A10 60.5 124.5 25 28 1.8 ZPT25D40-B5-A10 70.5 160.5 4.5 14.5 23.5 32 35 2.3 77 ZPT25D50-B5-A10 80.5 170.5 Dimensions by Stroke 20, 25 32 G Model E F E F U C ZPT 20-B5-A10 U C ZPT 30-B5-A10 U C ZPT 40-B5-A10 U C ZPT 50-B5-A10 U C ZPT 10-B5-A10 34.5

10%, 50/60 Hz15 A10 ARefer to alarm function.RS-485Approx. 88 lbs (40 kg) (including foot for fixing)Power cable, Foot for fixingCE marking

10%, 50/60 Hz15 A10 ARefer to alarm function.RS-232CApprox. 88 lbs (40 kg) (including foot for fixing)Power cable, Foot for fixingCE marking

10%, 50/60 Hz15 A10 ARefer to alarm function.RS-232CApprox. 88 lbs (40 kg) (including foot for fixing)Power cable, Foot for fixingCE marking

ZP

2 2 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across

phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.14 kg52 dB(A)57 lbs (26 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.26 kg55 dB(A)81.6 lbs (37 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.14 kg52 dB(A)57 lbs (26 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.14 kg52 dB(A)57 lbs (26 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.14 kg52 dB(A)57 lbs (26 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

ZP

0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPRD30-0-A10 ZPR 10-0-A10 80 142 81 143 91 57 57.5 23 91.5 ZPRD40-0-A10 90 178 91 179 129 67 67.5 129.5 77 51 ZPRD50-0-A10 100 188 101 189 139 77 77.5 139.5 87 175 87.5 175.5 One-touch Fitting 77 97 185 97.5 185.5 Model K L M ZPR-04-A10 4 10.4 20.6 ZPR-06-A10 6 12.8 21.6 13-11-39 Series ZPR Connection One-touch fitting Pad Form

Base mounted, plug-in type manifold for VQ2*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 12 port sizes available, Optional DIN rail mount, "MFLD, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, U6, VV5Q* BUILT IN FITTING

ZP

59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131 20 23 28 14 24 1.7 1.8 4 42 51 ZPY25 -A10 U C ZPY25D30--A10 79 141 25 ZPY32 -A10 U C 77 ZPY25D40--A10 89 177 42.5 32 35 14.5 24.5 2.3 4.5 99 187 ZPY25D50--A10 Dimensions by Stroke Dimensions by Tubing 20, 25 32 H Model F G F G Model J K L U C U C U C U C ZPY-4-A10 ZPY 10--A10 5 1.8 14.5 87 53.5 53 87.5 23 ZPY-6-A10 ZPY 20--A10 7

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

Title not found

23 A10-LB3 A10-LB 5 A10-LB4 10-32 Adjustable TEEs with O-Ring Seals Assembled 1/4 Hex 5/16 Hex (Not shown) 1/4 Hex 5/16 Hex 1/4 Hex 5/16 Hex 11/32 23/64 11/32 11/32 25/32 25/32 O'Ring O'Ring O'Ring 24 A10-T1 A10-T2 1/2 A10-T3 A10-T2 1/4 Hex 3/8 Hex 1/4 Hex 3/8 Hex 27/64 27/64 11/8 1 3/16 O'Ring O'Ring 25 A10-T4 A10-T5 10-32 Swivel Elbows Fibre Gasket Supplied 19 64 19 64 3 8 19 64 23

LECA6_C

HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 B1 OUT0 B2 OUT1 B2 OUT1 B3 OUT2 B3 OUT2 B4 OUT3 B4 OUT3 B5 OUT4 B5 OUT4 B6 OUT5 B6 OUT5 B7 BUSY B7 BUSY B8 AREA B8 AREA B9 SETON B9 SETON B10 INP B10 INP B11 SVRE B11 SVRE B12 ESTOP B12 ESTOP B13 ALARM B13 ALARM CN1 DC24V CN5 DC24V 27 - 7

LECP6_C

HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 B1 OUT0 B2 OUT1 B2 OUT1 B3 OUT2 B3 OUT2 B4 OUT3 B4 OUT3 B5 OUT4 B5 OUT4 B6 OUT5 B6 OUT5 B7 BUSY B7 BUSY B8 AREA B8 AREA B9 SETON B9 SETON B10 INP B10 INP B11 SVRE B11 SVRE B12 ESTOP B12 ESTOP B13 ALARM B13 ALARM CN1 DC24V CN5 /DC24V 27 - 7 () 2 () ) () 3 71 12 64 ()() No. 1

LA-OMT0056

A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input

Stability of suction position,

Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-T32UMl-A10 22.1 21.8 24.6 ZP3E-T40UMl-A10 23.2 22.7 26.2 ZP3E-T50UMl-A10 33.8 33.0 39.2 408 A With Set Screw: Vacuum Inlet Vertical ZP3E Series Pad diameter 63 to 125 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T63UMl-A16 ZP3E-T80UMl-A16 10 M16 x 1.5 48.9 Seal washer