PF2A

Detection type Indicator light Operating pressure range Proof pressure Accumulated flow range Note 4) 0 to 50C 5% F.S. or less 1% F.S. or less 2% F.S. or less 3% F.S. or less (15 to 35C, based on 25C), 5% F.S. or less (0 to 50C, based on 25C) 160 mA or less 170 mA or less 290 g 150 mA or less 250 g 1/8, 1/4 3/8 1/2 Heater type 3-digit, 7-segment LED 50 kPa to 0.75 MPa 50 kPa to 0.5 MPa 1.0

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

MXW Non-rotating accuracy Rc 1/8 M5 x 0.8 Rc 1/8 M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

MIW/MIS

Increase by scraper (g) Model Model Stroke (mm) Mass (g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 650 10 30 20 MIW20-20D MIW 32 mm 1550 20 30 25 MIW25-25D For MIW, same stroke as bore size 2650 35 100 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 2 3 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10

RLQ

Nil S n Nil Without auto switch B A L F G D Through-hole (Standard) Both ends tapped style Foot style Rod flange style Head flange style Double clevis style For the applicable auto switch model, refer to the table below.

High Speed 2 Port Valve SX10 Series

High Speed 2 Port Valve SX10 Series RoHS How to Order 2 F SX1 A G Lead wire (grommet) length Valve mounting Flow rate/Operating frequency (at 24 VDC, 0.25 MPa) Symbol Length G 300 mm H 500 mm J 1000 mm 1 Screw mount type Note) 2 Quick disconnect type Symbol Flow rate (L/min) Power consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws

VK300

F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

VK3000

Note Bracket VK300-43-2A With screw Body ported VK3120 1 G M5 VK3140 1 G 01 Base mounted CE-compliant Valve option CE-compliant Nil Nil Standard For low wattage (2 W DC) Q Y Note) Applicable only for DIN terminal type Applicable voltage: 12 and 24 VDC Thread type Nil F N T Rc Light/Surge voltage suppressor Nil None With surge voltage suppressor With light/surge voltage suppressor (Type

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

5 w Valve type e Seal material q Series r Pressure range t Thread type y Port size 2 3 4 1 2 A B 05 10 16 10 15 20 25 SGC200 SGC300 SGC400 Normally closed Normally open NBR FKM Pressure range 0 to 0.5 MPa Pressure range 0 to 1 MPa Pressure range 0 to 1.6 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Nil G N T SGC200 SGC300 SGC400 o Electrical entry Y u Pilot valve W: M12 connector Note) T:

Coolant Valve Series SGH

External pilot solenoid 1 Y A G 1 T Z B1 10 2 1 70 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series y Port size t Thread type e Seal material 70 r Pressure range w Valve type 1 2 3 4 1 2 A B 10 15 20 25 SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

Clean Regulator SRH Series

730 g 360 g 730 g Weight 857

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

How to Order VP 3 4 2 5 G 1 01 A Body ported Series 3 5 7 Pilot type VP300 VP500 VP700 Thread type Bracket Nil R Internal pilot External pilot Nil F N T Rc G NPT NPTF Nil F Without bracket With bracket Pressure specification Nil K Standard (0.7 MPa) High-pressure type (1.0 MPa) Coil specification Nil T Standard Rated voltage With power saving circuit (DC only) Type of actuation A B N.C.

VQ4000

Base Mounted Plug-in/Plug Lead: Single Unit VQ4000 Series How to Order Valves (Single Unit) [Option] Port size Body Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 1/4 03 3/8 Thread type SV Nil Rc F G N NPT T NPTF Enclosure Nil Dust-protected SYJ Sub-plate W Dust-tight/ Water-jet-proof (IP65) SZ 0 5 VQ4 0 1 Plug-in 1 02 VF 1 5 G VQ4 2 5 1 02 Plug lead VP4 CE-compliant Porting

VXE21/22/23

Nil T F N Rc NPTF G NPT Refer to page 43 for ordering coil only. Suffix Oil-free Nil Z Electrical entry Select Nil because the solenoid valve V, M options are oil-free treatment. G-Grommet C-Conduit Port size Refer to Table (1) shown below for availability.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Thread type Suffix Nil T F N Oil-free Rc NPTF G NPT Nil Z Electrical entry G -Grommet GS-With grommet surge voltage suppressor C-Conduit Select nil because the solenoid valve option V is the oil-free treatment.

ZL112A

voltage suppressor Z With light/surge voltage suppressor U With light/surge voltage suppressor (Non-polar type) 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire K1 Supply valve (N.C.), Release valve (N.C.)

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 2 1.6 20 3 25 3 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 3 4.5 35 4 50 4 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

Step Motor Controller (Servo / 24 VDC)

Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

KS/KX

A flexible polyurethane tube is recommended when the lateral load is applied. 15-2-39 Series KS/KX Male connector: KSH (Standard) H (width across flats) Applicable Connection thread R Min. port size Effective area (mm2) Nylon Urethane Weight (g) Model M D2 L A D1 tubing O.D.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket