Seal kit includes a grease pack (20 to 50: 10 g, 63, 80: 20 g). Order with the following part number when only the grease pack is needed.
MXW Non-rotating accuracy M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.
Description Contents MHF2-20D MHF2-20D1 MHF2-20D2 DMHF20-PS MHF20-PS MHF20-PS Seal kit 20, 21, 22 MHF-A2002 MHF-A2002-1 MHF-A2002-2 Finger assembly 3, 4, 5, 6, 14, 16, 19 Mounting screw Replacement part/Grease pack part no.: MHF2-D, D1 (12, 16, 20) MHF2-D2 (12) GR-S-005 (5 g) (Guide unit) GR-L-005 (5 g) (Cylinder unit) GR-S-005 (5 g) (Guide unit) MHF2-D2 (16, 20) GR-L-010 (10 g) (Cylinder
JIS Symbol VY1 G 2 G 1 R 00 02 AU PPA Construction Lube unit AL Body Diaphragm assembly Valve assembly Sight dome Plug assembly of supplying oil Body size (Standard) Gasket for valve guide Thread type Nil N F 1 8 Damper 1 2 3 Rc NPT G 4 1 O-ring 3 8 Auto-drain specifications Description Component Parts AU100 type Body Material Zinc die-casted, Aluminum die-casted No.
76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.
Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings) Variations R 1/ 4, NPT 1/4, G
None With light/Surge voltage suppressor (Except type G) With surge voltage suppressor (Type G only) VX2 Option Option S VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Function plate (D seal, with thread): DXT060-32-4A Electrical entry G E T D VX3
VDW Thread type Nil T F N VQ Orifice size Rc NPTF G NPT 2 3 4 5 6 3 mm 4.5 mm 6 mm 8 mm 10 mm VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to the table (1) given below for availability.
H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5) 24.6 38 48 4 2
VY1200-00-N VEX3222-5M Description E-P HYREG valve 3 position valve No. q w VE VY Exclusive controller VYU5-D G Rotary switch, Trimmer container 4-4.5 AL STOP START SEL. SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR.
1/4 F02 o o Connection G(PR 3/8 F03 o o Connection G(PR 1/2 F04 o O: Standard specifications O: Combination possible Blank: Combination not possible Modular Connection Part Numbers muxm : Air filter NAF3OOO NAF4OOO Mist separator NAFM3OOO NAFM4OOO L-bracket B31OL 841 OL T-bracket B31OT B41OT Spacer Y30 Y40 Spacer with L-bracket Y3OL Y4OL Soacer with T-bracket Y3OT Y4OT o c o F to G E Modular
U + . 1 1 + . 2 4 = | . t g 0 2 Port location on head cover Perpendiculat to the cylinder axis or in-line with the cylinder axis locations are available for basic type. (06 is not avaihble in perpendicular type.)
How to Order VCHR 06 30 G Body size Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) 30 40 Symbol Port size Port size VCHR30 VCHR40 Symbol 06 10 14 3/4 1 11/2 630 Series VCHR Direct Operated Regulator for 6.0 MPa (Relieving Type) Specifications Model VCHR30 VCHR40 Valve construction Piston type Valve material Polyurethane elastomer Relief mechanism Relieving type
Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 400 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF
B C D E F G H P U Load (kn) Weight (g) M A MB JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 JA160-36-200 2.5 4.4 11 18 28 71 M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 M27 X 2 M36 X 2 49.5 60 71.5 101 123 178 19.5 20 22 28 34 51 22 24 25 30 38 55 24 31 41 59,5 66 96 5 6 7.5 11.5 13 16 8 11 14 24 27 36 8 11 13.5 16 20 24 17 22 27 32 41 55 9 13 15 18 24 42 0.5 0.75 1.0 2.0 2.0
MXP D-A44C D-A44 MG G(PF)1/2 (Suitable cable O.D. 6.8 to 11.5) Auto switch MGP HW A 49.5 B G(PF)1/2 (Suitable cable O.D. 6.8 to 11.5) MGQ @ HS 31.5 MGG 56 MGC A 36 B 36 MGF Auto switch CY1 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-B5/B6 D-B59W D-G5l D-K59 D-G5NTL D-G5lW D-K59W D-G5BAL D-G59F Auto switch model Auto switch model D-A3 D-G39 D-K39 D-A44 D-A5 D-A6
Fluid Nil Rc A G B NPT 5 Steam * The thread type for the main piping and pilot piping is the same.
Pipe thread type Name plate in imperial units Pressure gauge in imperial units Sales Note 6) G EA, EB, EC, ED Nil Rc MPa MPa Fixed SI unit Japan, Overseas NPT G Rc Only overseas NPT psi psi With unit conversion function (Initial value psi) G Z Note 4) Note 4) For pipe thread type: NPT Note 5) For options: EA, EB, EC, ED Note 6) According to the new Measurement Law, only the SI unit type is
Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-35 Series VZM400 How to Order S 01 01 0 VZM45 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push botton selector Rc 01 1 8 NPT N01 1 8 G F01 1 8 Roller lever 01 Black One Way Roller Lever 02 Green Straight plunger
lead wire and M12 connector 175 g 182 g 191 g 3 A